Device and method for electronic device test
First Claim
1. A test device for testing a plurality of electronic devices formed on a wafer, comprising:
- a pattern supply part for supplying a test pattern to each of the plurality of electronic devices;
a measurement part for measuring data indicating operation of each of the plurality of electronic devices generated from the test pattern;
a judgment part for judging acceptability of other electronic devices based on the data of at least one of the electronic devices among the plurality of electronic devices, wherein the data of each of the plurality of electronic devices is measured by the measurement part under the same condition and at the same time; and
calculating a reference value for judging the acceptability of each of the plurality of electronic devices using the data of the plurality of electronic devices,wherein said judgment part judges the acceptability of each of the plurality of electronic devices using the reference value and the data of each of the plurality of electronic devices.
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Accused Products
Abstract
A test device tests acceptability of a plurality of electronic devices formed on a wafer. The test device includes: a pattern supply part for supplying test patterns to each of the plurality of electronic devices; a power supply for applying power supply voltage to each of the plurality of electronic devices; a measurement part for measuring the data indicating the operations of each of the electronic devices generated by the test patterns; a calculation part for calculating the reference values for judging the acceptability of each of the electronic devices; and a judgment part for judging the acceptability of each of the electronic devices.
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Citations
18 Claims
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1. A test device for testing a plurality of electronic devices formed on a wafer, comprising:
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a pattern supply part for supplying a test pattern to each of the plurality of electronic devices; a measurement part for measuring data indicating operation of each of the plurality of electronic devices generated from the test pattern; a judgment part for judging acceptability of other electronic devices based on the data of at least one of the electronic devices among the plurality of electronic devices, wherein the data of each of the plurality of electronic devices is measured by the measurement part under the same condition and at the same time; and calculating a reference value for judging the acceptability of each of the plurality of electronic devices using the data of the plurality of electronic devices, wherein said judgment part judges the acceptability of each of the plurality of electronic devices using the reference value and the data of each of the plurality of electronic devices. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. A test method for testing a plurality of electronic devices formed on a wafer, comprising steps of:
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inputting a test pattern to each of the plurality of electronic devices; measuring data indicating operation of each of the plurality of electronic devices generated from the test pattern; judging acceptability of other electronic devices based on the data of at least one of the electronic devices among the plurality of electronic devices, wherein the data of each of the plurality of electronic devices is measured by the measurement part under the same condition and at the same time; and calculating a reference value for judging the acceptability of each of the plurality of electronic devices using the data of the plurality of electronic devices, wherein the acceptability of each of the electronic devices is judged in said judgment step using the reference value and the data of each of the electronic devices. - View Dependent Claims (15, 16, 17, 18)
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Specification