Pressure sensor with a radially tensioned metal diaphragm
First Claim
1. A method of forming a pressure sensor comprising the steps of:
- providing a first body member and a second body member;
preheat-treating said first body member and said second body member;
disposing a flexible diaphragm formed from an annealed precipitation hardening material between said first and second body members after said first and second body members have undergone said preheat-treating;
attaching said body members to said diaphragm such that a first fluid chamber is formed between said first body member and said diaphragm and a second fluid chamber is formed between said second body member and said diaphragm; and
heat treating said first and second body members and said diaphragm to tension said diaphragm.
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Abstract
A pressure sensor having a radially tensioned diaphragm for measuring fluid pressure. The pressure sensor includes a first generally concave metal body member and a second generally concave metal body member, and a radially tensioned flexible metal diaphragm disposed therebetween that is tensioned by heating the sensor. The first and second body members are formed from a material having a coefficient of thermal expansion in the range of approximately 0.0000056 inch/inch/° F. to 0.0000064 inch/inch/° F. The diaphragm is formed from a precipitation hardening metal material having a coefficient of thermal expansion of approximately 0.0000060 inch/inch/° F. The first body member and the second body member are formed from a ferromagnetic metal material such that the first and second body members shield the diaphragm from magnetic fields which may otherwise cause movement of the diaphragm.
27 Citations
9 Claims
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1. A method of forming a pressure sensor comprising the steps of:
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providing a first body member and a second body member; preheat-treating said first body member and said second body member; disposing a flexible diaphragm formed from an annealed precipitation hardening material between said first and second body members after said first and second body members have undergone said preheat-treating; attaching said body members to said diaphragm such that a first fluid chamber is formed between said first body member and said diaphragm and a second fluid chamber is formed between said second body member and said diaphragm; and heat treating said first and second body members and said diaphragm to tension said diaphragm. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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Specification