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Pressure sensor with a radially tensioned metal diaphragm

  • US 7,073,385 B2
  • Filed: 02/13/2004
  • Issued: 07/11/2006
  • Est. Priority Date: 02/04/2002
  • Status: Expired due to Fees
First Claim
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1. A method of forming a pressure sensor comprising the steps of:

  • providing a first body member and a second body member;

    preheat-treating said first body member and said second body member;

    disposing a flexible diaphragm formed from an annealed precipitation hardening material between said first and second body members after said first and second body members have undergone said preheat-treating;

    attaching said body members to said diaphragm such that a first fluid chamber is formed between said first body member and said diaphragm and a second fluid chamber is formed between said second body member and said diaphragm; and

    heat treating said first and second body members and said diaphragm to tension said diaphragm.

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