Pressure sensors having neutral plane positioned transducers
First Claim
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1. A pressure sensor structure comprising:
- a substrate formed with a passage oriented orthogonally to said neutral plane;
a compliant member mounted on said substrate in a manner such that said compliant member spans said passage and has first and second opposing exposed surfaces, wherein said compliant member is positioned at least proximal to said structure'"'"'s neutral plane; and
first and second strain transducers are associated with said compliant member so that their outputs respond oppositely to deflection of said compliant member resulting from differential pressure across said compliant member but respond similarly to deformation of the substrate;
wherein said first and second strain transducers are piezoresistors fabricated from a stable gauge material; and
wherein said structure has a sensitivity sufficient to measure pressure changes of about ±
1 mmHg.
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Abstract
Implantable pressure sensors and methods for making and using the same. A feature of of at least some of the subject pressure sensors is that they are low-drift sensors. Additional features of representable pressure sensors include the presence of a compliant member mounted on a substrate in a manner such that the compliant member has first and second opposing exposed surfaces and is positioned at least proximal to the said pressure sensor'"'"'s neutral plane. The subject pressure sensors find use in a variety of applications.
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Citations
32 Claims
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1. A pressure sensor structure comprising:
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a substrate formed with a passage oriented orthogonally to said neutral plane; a compliant member mounted on said substrate in a manner such that said compliant member spans said passage and has first and second opposing exposed surfaces, wherein said compliant member is positioned at least proximal to said structure'"'"'s neutral plane; and first and second strain transducers are associated with said compliant member so that their outputs respond oppositely to deflection of said compliant member resulting from differential pressure across said compliant member but respond similarly to deformation of the substrate; wherein said first and second strain transducers are piezoresistors fabricated from a stable gauge material; and wherein said structure has a sensitivity sufficient to measure pressure changes of about ±
1 mmHg. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32)
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Specification