Aligning apparatus, exposure apparatus, and device manufacturing method
First Claim
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1. An aligning apparatus comprising:
- a moving member;
a magnetic member arranged vertically above said moving member;
a stator unit which is arranged vertically below said moving member and has a plurality of coreless coils;
a first magnet unit which is provided to said moving member and generates a force with said magnetic member;
a second magnet unit which is provided to said moving member and generates a force with said stator unit; and
attraction preventing means provided between said first magnet unit and said magnetic member for preventing said first magnet unit and said magnetic member from attracting each other,wherein said aligning apparatus has no coils between said magnetic member and said moving member.
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Abstract
An aligning apparatus includes a moving member, a magnetic member arranged vertically above the moving member, a stator unit which is arranged vertically below the moving member and has a plurality of coreless coils, a first magnet unit which is provided to the moving member and generates a force with the magnetic member, and a second magnet unit which is provided to the moving member and generates a force with the stator unit. The aligning apparatus has no coils between the magnetic member and the moving member.
34 Citations
17 Claims
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1. An aligning apparatus comprising:
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a moving member; a magnetic member arranged vertically above said moving member; a stator unit which is arranged vertically below said moving member and has a plurality of coreless coils; a first magnet unit which is provided to said moving member and generates a force with said magnetic member; a second magnet unit which is provided to said moving member and generates a force with said stator unit; and attraction preventing means provided between said first magnet unit and said magnetic member for preventing said first magnet unit and said magnetic member from attracting each other, wherein said aligning apparatus has no coils between said magnetic member and said moving member. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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Specification