Method of fabricating a semi-transmission LCD by plasma processing and washing organic film, and LCD fabricated thereby
First Claim
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1. A method for fabricating a semi-transmission liquid crystal display, comprising:
- forming a thin film transistor on a transparent substrate;
forming an organic film on said substrate;
forming a surface improving layer on a surface of said organic film by plasma processing of said organic film;
washing a surface of said surface improving layer using a washing liquid, said washing liquid comprising an alkaline liquid;
forming a transparent electrode film on said surface of said surface improving layer washed by the washing liquid;
exposing said improving layer through said transparent electrode film by patterning said transparent electrode film to a desired pattern;
forming a reflection electrode film on said surface of said patterned transparent electrode film and said surface of said improving layer exposed through said transparent electrode;
forming a resist mask for forming an opening portion for exposing said transparent electrode film through said reflection electrode film, said forming said resist mask comprising;
forming a resist film on a whole surface of said reflection electrode film;
exposing said resist film; and
developing said resist film;
patterning said reflection electrode film by using said resist mask such that said transparent electrode film is exposed trough said opening portion of said reflection electrode film; and
removing said resist mask.
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Abstract
In a semi-transmission type liquid crystal display and a method for fabricating the same, a reflective electrode such as aluminum layer and a transparent electrode such as ITO film are used to form a pixel electrode that is provided on an organic film having an uneven surface. In order to effectively restrict the battery effect between a reflective electrode and a transparent electrode, a surface of the organic film is put in a plasma-processing and then is washed by a washing liquid. Thereafter, the transparent electrode is formed and then the reflective electrode such as a double layer electrode of the aluminum layer and the molybdenum layer are formed.
27 Citations
14 Claims
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1. A method for fabricating a semi-transmission liquid crystal display, comprising:
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forming a thin film transistor on a transparent substrate; forming an organic film on said substrate; forming a surface improving layer on a surface of said organic film by plasma processing of said organic film; washing a surface of said surface improving layer using a washing liquid, said washing liquid comprising an alkaline liquid; forming a transparent electrode film on said surface of said surface improving layer washed by the washing liquid; exposing said improving layer through said transparent electrode film by patterning said transparent electrode film to a desired pattern; forming a reflection electrode film on said surface of said patterned transparent electrode film and said surface of said improving layer exposed through said transparent electrode; forming a resist mask for forming an opening portion for exposing said transparent electrode film through said reflection electrode film, said forming said resist mask comprising; forming a resist film on a whole surface of said reflection electrode film; exposing said resist film; and developing said resist film; patterning said reflection electrode film by using said resist mask such that said transparent electrode film is exposed trough said opening portion of said reflection electrode film; and removing said resist mask. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A semi-transmission liquid crystal display fabricated by a method for fabricating a semi-transmission liquid crystal display, said method comprising:
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forming a thin film transistor on a transparent substrate; forming an organic film on said substrate; forming a surface improving layer on a surface of said organic film by plasma processing of said organic film; washing a surface of said surface improving layer using a washing liquid; forming a transparent electrode film on said surface of said surface improving layer washed by the washing liquid; exposing said improving layer through said transparent electrode film by patterning said transparent electrode film to a desired pattern; forming a reflection electrode film on said surface of said patterned transparent electrode film and said surface of said improving layer exposed through said transparent electrode; forming a resist mask for forming an opening portion for exposing said transparent electrode film through said reflection electrode film, said forming said resist mask comprising; forming a resist film on a whale surface of said reflection electrode film; exposing said resist film; and developing said resist film; patterning said reflection electrode film by using said resist mask such that said transparent electrode film is exposed through said opening portion of said reflection electrode film; and removing said resist mask, wherein said display comprises; a pixel electrode in a region defined by adjacent two scan lines and adjacent two data lines, said pixel electrode being divided into a transparent electrode region and a reflection electrode region both of which are fanned on said washed improving layer of said organic film, and wherein said pixel electrode is divided by lines extending in parallel to said data line and lines extending in parallel to said scan line to form a plurality of transparent electrode regions and reflection electrode regions arranged in a checkered pattern. - View Dependent Claims (12, 13, 14)
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Specification
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Current AssigneeNLT Technologies, Ltd.
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Original AssigneeNEC LCD Technologies Limited (NEC Corporation)
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InventorsOyama, Manabu, Shinohara, Masaki, Ihida, Satoshi
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Primary Examiner(s)SCHECHTER, ANDREW M
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Application NumberUS10/282,179Publication NumberTime in Patent Office1,351 DaysField of Search349/114, 349/122, 349/138US Class Current349/114CPC Class CodesG02F 1/133553 Reflecting elements associa...G02F 1/133555 TransflectorsG02F 1/1362 Active matrix addressed cel...
