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Method and system for managing semiconductor manufacturing equipment

  • US 7,076,318 B2
  • Filed: 11/14/2003
  • Issued: 07/11/2006
  • Est. Priority Date: 09/30/1998
  • Status: Expired due to Fees
First Claim
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1. A method of controlling semiconductor manufacturing equipment, comprising:

  • sampling a plurality of data;

    generating a correlation matrix based on the plurality of data;

    generating an inverse matrix of the correlation matrix in order to generate a Mahalanobis space;

    generating a Mahalanobis distance based on the Mahalanobis space; and

    generating a control signal which indicates that an operation of the semiconductor manufacturing equipment should be stopped when the Mahalanobis distance exceeds a threshold value.

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