Via/line inductor on semiconductor material

• US 7,078,998 B2
• Filed: 01/09/2004
• Issued: 07/18/2006
• Est. Priority Date: 12/28/2001
• Status: Expired due to Term

• Current Assignee: Chartered Semiconductor Manufacturing Incorporated (Mamoura Diversified Global Holding PJSC)
• Original Assignee: Chartered Semiconductor Manufacturing Incorporated (Mamoura Diversified Global Holding PJSC)
• Inventors: Chu, Shao-fu Sanford, Wang, Yi Min, Zhang, Jiong
• Primary Examiner(s): Nguyen, Tuyen T
• Application Number:
  US10/754,973
• Publication Number:
  US 20040140526A1
• Time in Patent Office: 921 Days
• Field of Search: 336/83, 336199-206, 336/223, 336/232, 257/531
• US Class Current: 336/200
• CPC Class Codes: H01L 27/08 including only semiconductor components of a single kind
• CPC Class Codes: H01L 28/10 Inductors
• CPC Class Codes: Y10T 29/4902 Electromagnet, transformer or inductor

Abstract

A spiral inductor is provided including a substrate and an inductor dielectric layer over the substrate having a spiral opening provided therein. The spiral inductor is in the spiral opening with the spiral inductor including a plurality of parallel spiral vias connected together at center proximate and center distal ends of the spiral inductor.

Claims

1. A spiral inductor comprising:

a substrate;

an inductor dielectric layer over the substrate having a spiral opening provided therein; and

a spiral inductor in the spiral opening, the spiral inductor including;

a plurality of parallel spiral vias connected together at center proximate and center distal ends of the spiral inductor and only along a top or bottom edge.

2. The spiral inductor as claimed in claim 1 wherein:

the spiral inductor includes;

a spiral line in the spiral opening; and

the plurality of parallel spiral vias above the spiral line and integral therewith.

3. The spiral inductor as claimed in claim 1 wherein:

the spiral inductor includes;

a spiral line over the plurality of parallel spiral vias and integral therewith.

4. The spiral inductor as claimed in claim 1 including:

a first connecting portion;

connecting via between the first connecting portion and the center proximate end of the spiral inductor; and

a second connecting portion connected to the center distal end of the spiral inductor.

5. The spiral inductor as claimed in claim 1 wherein:

the spiral opening forms a multi-turn spiral from a group consisting of square, rectangular, and circular spirals.

6. A spiral inductor comprising:

a substrate;

a field dielectric layer over the substrate;

an inductor dielectric layer over the field dielectric layer having a spiral opening provided therein;

a spiral inductor in the spiral opening, the spiral inductor including;

a plurality of parallel spiral vias connected together at center proximate and center distal ends of the spiral inductor and only along a top or bottom edge;

a first connecting portion connected to the center proximate end of the spiral inductor; and

a second connecting portion connected to the center distal end of the spiral inductor.

7. The spiral inductor as claimed in claim 6 wherein:

the spiral inductor includes;

a spiral line in the spiral opening connected together to the parallel spiral vias at the center proximate and the center distal ends of the spiral inductor; and

the plurality of parallel spiral vias above the spiral line and integral therewith.

8. The spiral inductor as claimed in claim 6 wherein:

the spiral inductor includes;

a spiral line over the plurality of parallel spiral vias and integral therewith, the spiral line connected together to the parallel spiral vias at the center proximate and the center distal ends of the spiral inductor.

9. The spiral inductor as claimed in claim 6 including:

a connecting portion dielectric layer over the field dielectric and under the inductor dielectric layer, the connecting portion dielectric layer having an opening provided therein for the first connecting portion;

connecting via between the first connecting portion and the center proximate end of the spiral inductor; and

a second connecting portion connected to the center distal end of the spiral inductor.

10. The spiral inductor as claimed in claim 6 wherein:

the spiral opening forms a multi-turn spiral from a group consisting of square, rectangular, and circular spirals.

11. The spiral inductor as claimed in claim 6 wherein:

the spiral inductor is fabricated by an aluminum via/line process or a copper damascene process.