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Mirror substrate, mirror body using the same, and optical device using mirror body

  • US 7,080,915 B2
  • Filed: 04/13/2004
  • Issued: 07/25/2006
  • Est. Priority Date: 04/14/2003
  • Status: Active Grant
First Claim
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1. A mirror substrate, wherein the substrate is made of a particle-dispersed silicon material composed of silicon carbide and silicon, and the surface of said substrate to be used as a reflecting surface is polished to a mirror finish,wherein the Vickers hardness of said mirror substrate is 1,500 Hv or more, the 3 point bending hardness is 500 MPa or more, and the thermal conductivity is 100 W/m-K or more.

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