Adhesive of a silicon and silica composite particularly useful for joining silicon parts
First Claim
1. A method of joining two silicon parts along respective joining areas, comprising the steps of:
- providing a flowable mixture of a silicon powder and a silica bridging agent;
applying said flowable mixture to at least one of said joining areas;
assembling said two silicon parts with said respective joining areas in juxtaposition; and
annealing said assembled parts at an annealing temperature sufficient to convert said silica bridging agent to a silica network.
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Accused Products
Abstract
A method of joining two silicon members, the adhesive used for the method, and the joined product, especially a silicon tower for supporting multiple silicon wafers. A flowable adhesive is prepared comprising silicon particles of size less than 100 μm and preferably less than 100 nm and a silica bridging agent, such as a spin-on glass. Nano-silicon crystallites of about 20 nm size may be formed by CVD. Larger particles may be milled from virgin polysilicon. If necessary, a retardant such as a heavy, preferably water-insoluble alcohol such as terpineol is added to slow setting of the adhesive at room temperature. The mixture is applied to the joining areas. The silicon parts are assembled and annealed at a temperature sufficient to link the silica, preferably at 900° C. to 1100° C. for nano-silicon but higher for milled silicon.
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Citations
32 Claims
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1. A method of joining two silicon parts along respective joining areas, comprising the steps of:
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providing a flowable mixture of a silicon powder and a silica bridging agent; applying said flowable mixture to at least one of said joining areas; assembling said two silicon parts with said respective joining areas in juxtaposition; and annealing said assembled parts at an annealing temperature sufficient to convert said silica bridging agent to a silica network. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25)
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26. A method of joining two silicon parts along respective joining areas, comprising:
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providing a flowable mixture of a silicon powder and a silica bridging agent; applying the flowable mixture to at least one of the joining areas; assembling said two silicon parts with said joining areas being opposed to each other; and heating the assembled parts to an elevated temperature sufficient to convert the silica bridging agent into a glass bonded to both of the joining areas. - View Dependent Claims (27, 28, 29)
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30. A method of joining two silicon parts along respective joining areas, comprising the steps of:
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providing a mixture of a powder consisting essentially of silicon and a chemical which when annealed to an annealing temperature vitrifies to form a silicate glass; applying the mixture to at least one of the joining areas; assembling the two silicon parts with the respective joining areas in juxtaposition; and annealing the assembled parts at the annealing temperature to thereby bond the parts together. - View Dependent Claims (31, 32)
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Specification