Method for manufacturing a micro-actuator
First Claim
1. A method for manufacturing a micro-actuator comprising the steps of:
- forming a top structure by processing a first plate, the top structure comprising a substantially rectangular stage, a plurality of driving comb-type electrodes formed on the bottom of the stage, a first frame layer separated from and surrounding the stage along the periphery the stage and having a first height, and at least one torsion bar for suspending the stage from the first frame layer and providing a restoring force upon rotation of the stage along an axial direction of the torsion bar;
forming a bottom structure by processing a second plate and a base plate, the bottom structure comprising a base plate, a plurality of fixed comb-type electrodes formed on the base plate, and a second frame layer formed on the base plate and surrounding the fixed comb-type electrodes and having a second height; and
joining the top and bottom structures to form one body by forming a eutectic bonding layer between the first frame layer and the second frame layer, said first frame layer being aligned with the second frame layer so that the driving comb-type electrodes interdigitate the fixed comb-type electrodes.wherein an electrostatic force induced between the driving comb-type electrodes and the fixed comb-type electrodes causes the stage to rotate alone the axial direction during operation of the micro-actuator.
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Abstract
A micro-actuator having a stage capable of a see-saw motion and a method for its manufacture are disclosed. In the micro-actuator according to the present invention, a plurality of parallel driving comb-type electrodes are formed on the bottom of the stage, and a plurality of parallel fixed comb-type electrodes are formed on a base plate. At both sides of the stage is a torsion bar that enables the see-saw motion. The torsion bar is supported by a frame comprised of a first frame layer and a second frame layer. The torsion bar and the first frame layer form one body. The first and second frame layers are bonded by a metal eutectic bonding layer between metal layers.
21 Citations
11 Claims
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1. A method for manufacturing a micro-actuator comprising the steps of:
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forming a top structure by processing a first plate, the top structure comprising a substantially rectangular stage, a plurality of driving comb-type electrodes formed on the bottom of the stage, a first frame layer separated from and surrounding the stage along the periphery the stage and having a first height, and at least one torsion bar for suspending the stage from the first frame layer and providing a restoring force upon rotation of the stage along an axial direction of the torsion bar; forming a bottom structure by processing a second plate and a base plate, the bottom structure comprising a base plate, a plurality of fixed comb-type electrodes formed on the base plate, and a second frame layer formed on the base plate and surrounding the fixed comb-type electrodes and having a second height; and joining the top and bottom structures to form one body by forming a eutectic bonding layer between the first frame layer and the second frame layer, said first frame layer being aligned with the second frame layer so that the driving comb-type electrodes interdigitate the fixed comb-type electrodes. wherein an electrostatic force induced between the driving comb-type electrodes and the fixed comb-type electrodes causes the stage to rotate alone the axial direction during operation of the micro-actuator. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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Specification