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Spatial light modulator with robust mirror substrate condition

  • US 7,085,059 B2
  • Filed: 03/23/2005
  • Issued: 08/01/2006
  • Est. Priority Date: 03/24/2004
  • Status: Active Grant
First Claim
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1. A light modulator for modulating light incident thereon, the modulator including a substrate having a plurality of reflectivity enhancing layers formed thereon, said plurality of reflectivity enhancing layers comprising at least:

  • a top surface for receiving light incident on the light modulator;

    a first layer overlying the substrate;

    a second layer between the top surface and the first layer, the second layer overlying and abutting the first layer; and

    wherein the second layer has a predetermined thickness which depends upon a wavelength of the light in the second layer, and the predetermined thickness of the second layer is such that the light passing through the second layer and reflecting off an interface between the first and second layers constructively interferes with the light reflected from the top surface.

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