MEMS tunable capacitor based on angular vertical comb drives
First Claim
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1. A tunable capacitor, comprising:
- a first plurality of spaced apart electrode fingers;
a second plurality of spaced apart electrode fingers;
a rotational coupling configured for positioning said first plurality of electrode fingers across a range of angular relationships with said second plurality of electrode fingers including at least one interposed position; and
means for rotationally moving said electrode fingers between a position wherein said electrode fingers and said electrodes are interdigitated and a position in which they are substantially non-interdigitated.
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Abstract
A MEMS tunable capacitor with angular vertical comb-drive (AVC) actuators is described where high capacitances and a wide continuous tuning range is achieved in a compact space. The comb fingers rotate through a small vertical angle which allows a wider tuning range than in conventional lateral comb drive devices. Fabrication of the device is straightforward, and involves a single deep reactive ion etching step followed by release and out-of-plane assembly of the angular combs.
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Citations
28 Claims
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1. A tunable capacitor, comprising:
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a first plurality of spaced apart electrode fingers; a second plurality of spaced apart electrode fingers; a rotational coupling configured for positioning said first plurality of electrode fingers across a range of angular relationships with said second plurality of electrode fingers including at least one interposed position; and means for rotationally moving said electrode fingers between a position wherein said electrode fingers and said electrodes are interdigitated and a position in which they are substantially non-interdigitated. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A tunable capacitor, comprising:
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a first pair of interdigitating electrode combs; a second pair of interdigitating electrode combs; and a rotational coupling configured for mechanically altering the angular relationship of said first pair of electrode combs in response to a voltage applied across said second pair of electrode combs; wherein the extent of interdigitation of said first pair of electrode combs is controlled in response to a voltage applied between the electrode combs in said second pair of electrode combs. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17)
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18. A tunable capacitor, comprising:
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a set of sensing electrodes; and a set of driving electrodes; wherein said sensing electrodes and said driving electrodes each include a plurality of electrode fingers; wherein said driving electrode fingers are movable between an non-interdigitated position and an interdigitated position; wherein said sensing electrode fingers are movable between an interdigitated position and a non-interdigitated position; and wherein movement of said driving electrode fingers between said non-interdigitated and said interdigitated positions causes movement of said sensing electrode fingers between said interdigitated and said non-interdigitated positions. - View Dependent Claims (19, 20)
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21. A tunable capacitor, comprising:
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a substrate base; a driving electrode, comprising a plurality of stationary spaced apart driving electrode fingers attached to said substrate base, a plurality of movable spaced apart driving electrode fingers configured for positioning between said stationary driving electrode fingers; a sensing electrode, comprising a plurality of stationary spaced apart sensing electrode fingers attached to said substrate base, a plurality of movable spaced apart sensing electrode fingers configured for positioning between said stationary sensing electrode fingers; and a hinge coupled between said movable electrode fingers of said sensing electrode and said movable electrode fingers of said driving electrode; wherein said sensing electrode fingers are angularly offset from said driving electrode fingers in relation to said substrate base; wherein said driving electrode fingers are movable between an interdigitated position in relation to said driving electrodes and a non-interdigitated position; wherein said sensing electrode fingers are movable between an interdigitated position in relation to said sensing electrodes and a non-interdigitated position; and wherein movement of said driving electrode fingers between said interdigitated and said non-interdigitated positions causes movement of said sensing electrode fingers between said non-interdigitated and said interdigitated positions. - View Dependent Claims (22, 23)
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24. A tunable capacitor, comprising:
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a first plurality of spaced apart electrode fingers; a second plurality of spaced apart electrode fingers configured for interdigitated positioning between said first plurality of electrode fingers; and a rotational coupling connecting said first and said second plurality of electrode fingers and configured for moving said electrode fingers between a position wherein said electrode fingers and said electrodes are interdigitated and a position in which they are substantially non-interdigitated; wherein the combination of said electrode fingers and said rotational coupling are configured to respond to a sufficient bias voltage applied between said first and second plurality of electrode fingers by changing the angular relationship and extent of interdigitation between said first and second plurality of electrode fingers. - View Dependent Claims (25, 26, 27, 28)
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Specification