Micro-opto-electro-mechanical waveguide switches

• US 7,085,445 B2
• Filed: 06/24/2003
• Issued: 08/01/2006
• Est. Priority Date: 08/04/2000
• Status: Expired due to Fees

• Current Assignee: Danjin Wu, Seungug Koh
• Original Assignee: Danjin Wu, Seungug Koh
• Inventors: Koh, Seungug, Wu, Danjin
• Primary Examiner(s): Palmer, Phan T. H.
• Application Number:
  US10/603,004
• Publication Number:
  US 20040264847A1
• Time in Patent Office: 1,134 Days
• Field of Search: 385/14, 385 16- 24, 385/49, 359872-874, 398 47- 57
• US Class Current: 385/22
• CPC Class Codes: G02B 6/3502 involving direct waveguide displacement, e.g. cantilever type waveguide displacement involving waveguide bending, or displacing an interposed waveguide between stationary waveguides
• CPC Class Codes: G02B 6/3546 NxM switch, i.e. a regular array of switches elements of matrix type constellation
• CPC Class Codes: G02B 6/3548 1xN switch, i.e. one input and a selectable single output of N possible outputs
• CPC Class Codes: G02B 6/356 in an optical cross-connect device, e.g. routing and switching aspects of interconnecting different paths propagating different wavelengths to (re)configure the various input and output links switching polarized beams G02B6/3594; power equalizers G02B6/356 and G02B6/3594; path selecting means H04Q11/0001
• CPC Class Codes: G02B 6/357 Electrostatic force electrostatic forces controlling reflecting elements in general G02B26/0841
• CPC Class Codes: G02B 6/3584 constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching MEMS per se B81B, B81C

Abstract

As the traffic volume carried by telecommunication networks has been rapidly increased as a result of the bandwidth-intensive applications such as Internet access, electronic commerce, multimedia applications, and distributed computing, it is imperative to utilize the optical network for backbone, metropolitan, and local area networks. The optical networks employing optical fibers as the transmission medium have exhibited a superior performance/cost ratio for both long-haul and short-haul routes and the emerging dense wavelength division multiplexing (DWDM)/all-optical networks have shown a promising potential to improve speed, capacity and connectivity of optical telecommunication networks. The present invention provides Micro-Opto-Electro-Mechanical Waveguide Switch (MOEM-WS) by integrating MEMS actuators and micromachined PLCs on the same substrate. The MOEM-WS is an integrated hybrid microsystem: Micro-Opto-Electro-Mechanical System (MOEMS) and it is particularly applicable for optical cross-connect (OXC) switches and optical add/drop multiplexers (OADM). The MOEM-WS can provide an essential fiber switching capability for DWDM/all-optical networks with numerous accompanying benefits such as low cost, small crosstalk, reliability, compactness, high speed, reconfigurability, modularity, scalability, and insensitiveness to signal wavelength and polarization.

Claims

1. A Micro-Opto-Electro-Mechanical Waveguide Switch (MOEM-WS) comprising:

a micromachined planar lightwave circuit (PLC) substrate having at least one integrated optical waveguide fabricated thereto and at least one optical fiber coupled into the integrated optical waveguide, wherein said micromachined PLC substrate comprising a silicon-on-insulator (SOI) wafer; and

a micro electromechanical actuator on the micromachined PLC substrate to move and align sender waveguide ports relative to a plurality of receiver waveguide ports.

2. The MOEM-WS as cited in claim 1, providing 1-input/N-output (1×

N) fiber switching or N-input/1-output (N×

1) fiber switching, wherein the port number N being any positive integer numbers and being determined by the number of waveguide ports on the said micromachined PLC.

3. The MOEM-WS as cited in claim 1, wherein said integrated optical waveguide supporting a single or a plurality of electromagnetic wave propagation modes along the waveguide and said integrated optical waveguide comprising a core and adjacent cladding composed of silica glass, polymer, SiON, silicon, or any other optical waveguide materials for electromagnetic wave propagation.

4. The MOEM-WS as cited in claim 1, further comprises a single or a plurality of electrically conductive pathways on said micromachined PLC substrate or said support substrate.

5. The MOEM-WS as cited in claim 1, further comprising photonic or electronic integrated circuits mounted on said micromachined PLC substrate for optical signal generation/detection or subsequent electronic signal processing.

6. The MOEM-WS as cited in claim 1, wherein said micro electromechanical actuator comprising a single or a plurality of moving cantilever flexures, upon which sender or receiver waveguide ports reside, and said micro electromechanical actuator providing a horizontal movement of the sender or receiver waveguide ports relative to the other waveguide ports on the opposite side, wherein the horizontal movement being either linear or angular displacement.

7. The MOEM-WS as cited in claim 1, wherein said micro electromechanical actuator utilizing a variety of MEMS side actuation mechanisms including electrostatic, magnetic, thermal, shape memory alloy, impact, piezoelectric actuations, or any other applicable MEMS actuation methods.

8. The MOEM-WS as cited in claim 1, wherein said micromachined PLC having silicon microgrooves filled with the a material substantially similar to said integrated optical waveguide in order to avoid the peeling between integrated optical waveguide layer and the silicon structure layer.

9. The MOEM-WS as cited in claim 1, wherein said micromachined PLC having tapered waveguide ports to increase the optical signal coupling efficiency and to reduce the alignment accuracy requirements between the movable waveguide port relative to the other waveguide ports on the opposite side, wherein, the tapered waveguide ports being either symmetric or asymmetric.

10. The MOEM-WS as cited in claim 1, providing a cascaded fiber switch array to expand the scale and functionality of MOEM-WS, wherein a large-scale cascaded fiber switch array comprising a plurality of serially interconnected small-scale fiber switch arrays on a single substrate.

11. The MOEM-WS as cited in claim 1, wherein said micromachined PLC comprising a single or a plurality of optical waveguides at both ports of sender and receiver waveguides for concurrent forward, backward, bi-directional, or full-duplex signal transmissions.

12. The MOEM-WS as cited in claim 1, providing a 2-input/2-output crossbar fiber switch, wherein said micromachined PLC comprising three waveguide channels at both sender and receiver waveguide ports, and further wherein, one of the receiver waveguide port being looped back into the appropriate sender waveguide port in order to construct “

bar” and

“

cross”

states.

13. The MOEM-WS as cited in claim 1, providing fiber to waveguide optical switch, wherein said micro electromechanical actuator to move and align a single or a plurality of optical fibers relative to a single or a plurality of said integrated optical waveguide.

14. The MOEM-WS as cited in claim 1, said integrated optical wavguide or said optical fiber being coated with antireflection films, and further wherein, a space between waveguide ports being filled with air, inert gas, or index-matching fluid.

15. The MOEM-WS as cited in claim 1, wherein said integrated optical waveguide further comprising a single or a plurality of tilted waveguide end facet in order to reduce back-reflections, and further wherein, said sender waveguide ports being properly shifted relative to said receiver waveguide ports to compensate offsets or displacements of transmitted signal from said tilted waveguide end facet.

16. A Micro-Opto-Electro-Mechanical Waveguide Switch (MOEM-WS) comprising:

a micromachined planar lightwave circuit (PLC) substrate having at least one integrated optical waveguide fabricated thereto and at least one optical fiber coupled into the integrated optical waveguide;

a micro electromechanical actuator on the micromachined PLC substrate to move and align sender waveguide ports relative to a plurality of receiver waveguide ports; and

a support substrate, wherein said support substrate being donded to said micromachined PLC substrate.

17. The MOEM-WS as cited in claim 16, providing 1 -input/N-output (1×

N) fiber switching or N-input/1-output (N×

1) fiber switching, wherein the port number N being any positive integer numbers and being determined by the number of waveguide ports on the said micromachined PLC.

18. The MOEM-WS as cited in claim 16, wherein said integrated optical waveguide supporting a single or a plurality of electromagnetic wave propagation modes along the waveguide and said integrated optical waveguide comprising a core and adjacent cladding composed of silica glass, polymer, SiON, silicon, or any other optical waveguide materials for electromagnetic wave propagation.

19. The MOEM-WS as cited in claim 16, further comprises a single or a plurality of electrically conductive pathways on said micromachined PLC substrate or said support substrate.

20. The MOEM-WS as cited in claim 16, further comprising photonic or electronic integrated circuits mounted on said micromachined PLC substrate for optical signal generation/detection or subsequent electronic signal processing.

21. The MOEM-WS as cited in claim 16, wherein said micro electromechanical actuator comprising a single or a plurality of moving cantilever flexures, upon which sender or receiver waveguide ports reside, and said micro electromechanical actuator providing a horizontal movement of the sender or receiver waveguide ports relative to the other waveguide ports on the opposite side, wherein the horizontal movement being either linear or angular displacement.

22. The MOBM-WS as cited in claim 16, wherein said micro electromechanical actuator utilizing a variety of MEMS side actuation mechanisms including electrostatic, magnetic, thermal, shape memory alloy, impact, piezoelectric actuations, or any other applicable MEMS actuation methods.

23. The MOEM-WS as cited in claim 16, wherein said micromachined PLC having silicon microgrooves filled with a material substantially similar to said integrated optical waveguide in order to avoid the peeling between integrated optical waveguide layer and the silicon structure layer.

24. The MOEM-WS as cited in claim 16, wherein said micromachined PLC having tapered waveguide ports to increase the optical signal coupling efficiency and to reduce the alignment accuracy requirements between the movable waveguide port relative to the other waveguide ports on the opposite side, wherein, the tapered waveguide ports being either symmetric or asymmetric.

25. The MOEM-WS as cited in claim 16, providing a cascaded fiber switch array to expand the scale and functionality of MOEM-WS, wherein a large-scale cascaded fiber switch array comprising a plurality of serially interconnected small-scale fiber switch arrays on a single substrate.

26. The MOEM-WS as cited in claim 16, wherein said micromachined PLC comprising a single or a plurality of optical waveguides at both ports of sender and receiver waveguides for concurrent forward, backward, bi-directional, or full-duplex signal transmissions.

27. The MOEM-WS as cited in claim 16, providing a 2-input/2-output crossbar fiber switch, wherein said micromachined PLC comprising three waveguide channels at both sender and receiver waveguide ports, and further wherein, one of the receiver waveguide port being looped back into the appropriate sender waveguide port in order to construct “

bar” and

“

cross”

states.

28. The MOEM-WS as cited in claim 16, providing fiber to waveguide optical switch, wherein said micro electromechanical actuator to move and align a single or a plurality of optical fibers relative to a single or a plurality of said integrated optical waveguide.

29. The MOEM-WS as cited in claim 16, said integrated optical wavguide or said optical fiber being coated with antireflection films, and further wherein, a space between waveguide ports being filled with air, inert gas, or index-matching fluid.

30. The MOEM-WS as cited in claim 16, wherein said integrated optical waveguide further comprising a single or a plurality of tilted waveguide end facet in order to reduce back-reflections, and further wherein, said sender waveguide ports being properly shifted relative to said receiver waveguide ports to compensate offsets or displacements of transmitted signal from said tilted waveguide end facet.