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Micro-opto-electro-mechanical waveguide switches

  • US 7,085,445 B2
  • Filed: 06/24/2003
  • Issued: 08/01/2006
  • Est. Priority Date: 08/04/2000
  • Status: Expired due to Fees
First Claim
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1. A Micro-Opto-Electro-Mechanical Waveguide Switch (MOEM-WS) comprising:

  • a micromachined planar lightwave circuit (PLC) substrate having at least one integrated optical waveguide fabricated thereto and at least one optical fiber coupled into the integrated optical waveguide, wherein said micromachined PLC substrate comprising a silicon-on-insulator (SOI) wafer; and

    a micro electromechanical actuator on the micromachined PLC substrate to move and align sender waveguide ports relative to a plurality of receiver waveguide ports.

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