Displacement estimation system and method

• US 7,085,673 B2
• Filed: 08/31/2004
• Issued: 08/01/2006
• Est. Priority Date: 08/31/2004
• Status: Expired due to Fees

• Current Assignee: Hewlett-Packard Development Company, L.P. (HP Inc.)
• Original Assignee: Hewlett-Packard Development Company, L.P. (HP Inc.)
• Inventors: Gao, Jun, Wu, Wei, Picciotto, Carl E.
• Primary Examiner(s): Bui, Bryan
• Assistant Examiner(s): Le, Toan M.
• Application Number:
  US10/930,614
• Publication Number:
  US 20060047473A1
• Time in Patent Office: 700 Days
• Field of Search: 702/158, 382/294, 382/144, 382/145, 382/141, 382/199, 382/100, 430/22, 430/30, 348/87, 348/126, 356/617
• US Class Current: 702/158
• CPC Class Codes: G06T 7/20 Analysis of motion motion estimation for coding, decoding, compressing or decompressing digital video signals H04N19/43, H04N19/51
• CPC Class Codes: G06T 7/70 Determining position or orientation of objects or cameras camera calibration G06T7/80

Abstract

A displacement estimation system including a data acquisition system and a processing system is provided. The data acquisition system is configured to capture a first frame from a first substrate including a first pattern and a second substrate including a second pattern at a first time and capture a second frame from a third substrate including a third pattern and a fourth substrate including a fourth pattern at a second time subsequent to the first time. The first pattern and the third pattern are substantially identical, and the second pattern and the fourth pattern are substantially identical. The processing system is configured to calculate a first displacement between the first pattern and the third pattern using the first frame and the second frame and calculate a second displacement between the second pattern and the fourth pattern using the first frame and the second frame.

Claims

1. A displacement estimation system comprising:

a data acquisition system; and

a processing system;

wherein the data acquisition system is configured to capture a first frame from a first substrate that includes a first pattern and a second substrate that includes a second pattern at a first time and capture a second frame from a third substrate that includes a third pattern and a fourth substrate that includes a fourth pattern at a second time subsequent to the first time,

wherein the first pattern and the third pattern are substantially identical, wherein the second pattern and the fourth pattern are substantially identical,

wherein the processing system is configured to calculate a first displacement between the first pattern and the third pattern using the first frame and the second frame and calculate a second displacement between the second pattern and the fourth pattern using the first frame and the second frame.

2. The displacement estimation system of claim 1 wherein the processing system is configured to calculate a third displacement using the first displacement and the second displacement.

3. The displacement estimation system of claim 2 wherein the processing system is configured to calculate the third displacement by subtracting the first displacement and the second displacement.

4. The displacement estimation system of claim 1 wherein the data acquisition system is configured to provide the first frame and the second frame to the processing system, and wherein the processing system is configured to identify the first pattern and the second pattern in the first frame and identify the third pattern and the fourth pattern in the second frame.

5. The displacement estimation system of claim 1 further comprising:

an adjustment system configured to receive the first displacement and the second displacement from the processing system;

wherein the adjustment system is configured to adjust a position of the third substrate using the first displacement and the second displacement.

6. The displacement estimation system of claim 5 wherein the adjustment system is configured to adjust a position of the fourth substrate using the first displacement and the second displacement.

7. The displacement estimation system of claim 1 further comprising:

a position adjustment system configured to receive the first displacement and the second displacement from the processing system;

wherein the position adjustment system is configured to adjust a position of a functional unit relative to a fifth substrate using the first displacement and the second displacement.

8. The displacement estimation system of claim 7 wherein the fifth substrate includes the third substrate.

9. The displacement estimation system of claim 8 wherein the position adjustment system is configured to adjust the position of the functional unit relative to the fourth substrate using the first displacement and the second displacement.

10. The displacement estimation system of claim 1 wherein the first substrate includes the third substrate, wherein the second substrate includes the fourth substrate, wherein the first pattern includes the third pattern, and wherein the second pattern includes the fourth pattern.

11. The displacement estimation system of claim 1 wherein the first substrate, the second substrate, the third substrate, and the fourth substrate are each selected from the group consisting of a semiconductor wafer, paper, and a web of material.

12. The displacement estimation system of claim 1 wherein the first pattern, the second pattern, the third pattern, and the fourth pattern each comprise a man-made pattern.

13. The displacement estimation system of claim 1 wherein the first pattern naturally occurs on the first substrate, wherein the second pattern naturally occurs on the second substrate, wherein the third pattern naturally occurs on the third substrate, and wherein the fourth pattern naturally occurs on the fourth substrate.

14. The displacement estimation system of claim 1 wherein the data acquisition system comprises an optical system.

15. The displacement estimation system of claim 1 wherein the data acquisition system comprises a non-optical system.

16. The displacement estimation system of claim 1 wherein processing system is configured to calculate each of the first displacement and the second displacement according to a resolution selected from the group consisting of pixel resolution and sub-pixel resolution.

17. A method comprising:

capturing a first frame from a first substrate including a first pattern and a second substrate including a second pattern at a first time;

capturing a second frame from a third substrate including a third pattern substantially identical to the first pattern and a fourth substrate including a fourth pattern substantially identical to the second pattern at a second time subsequent to the first time;

identifying the first pattern and the second pattern in the first frame;

identifying the third pattern and the fourth pattern in the second frame;

calculating a first displacement between the first pattern and the third pattern using the first frame and the second frame; and

calculating a second displacement between the second pattern and the fourth pattern using the first frame and the second frame.

18. The method of claim 17 further comprising:

calculating a third displacement using the first displacement and the second displacement.

19. The method of claim 18 further comprising:

calculating the third displacement by subtracting the first displacement and the second displacement.

20. The method of claim 18 wherein the first substrate includes the third substrate, wherein the second substrate includes the fourth substrate, wherein the first pattern includes the third pattern, and wherein the second pattern includes the fourth pattern.

21. The method of claim 20 further comprising:

adjusting a first position of the first substrate using the first displacement, the second displacement, and the third displacement; and

adjusting a second position of the second substrate using the first displacement, the second displacement, and the third displacement.

22. The method of claim 20 further comprising:

adjusting a position of a functional unit with respect to the first substrate and the second substrate using the first displacement, the second displacement, and the third displacement.

23. A system comprising:

means for capturing a first frame at a first time from a first substrate including a first pattern and a second substrate including a second pattern;

means for capturing a second frame at a second time subsequent to the first time from a third substrate including a third pattern substantially identical to the first pattern and a fourth substrate including a fourth pattern substantially identical to the second pattern;

means for calculating a first displacement between the first pattern and the third pattern using the first frame and the second frame; and

means for calculating a second displacement between the second pattern and the fourth pattern using the first frame and the second frame.

24. The system of claim 23 further comprising:

means for calculating a third displacement using the first displacement and the second displacement.

25. The system of claim 23 further comprising:

means for adjusting a position of the third substrate and a position of the fourth substrate using the first displacement and the second displacement.

26. The system of claim 23 further comprising:

means for adjusting a position of a functional unit relative to the third substrate and the fourth substrate using the first displacement and the second displacement.

27. The system of claim 23 wherein the first substrate includes the third substrate, wherein the second substrate includes the fourth substrate, wherein the first pattern includes the third pattern, and wherein the second pattern includes the fourth pattern.

28. The system of claim 23 wherein the first substrate and the second substrate are removed from the system entirely subsequent to the first time, and wherein the third substrate and the fourth substrate are placed in the system prior to the second time.

29. The system of claim 23 wherein the first frame comprises a reference frame, and wherein the second frame comprises a comparison frame.

30. The system of claim 23 wherein the first substrate, the second substrate, the third substrate, and the fourth substrate are each selected from the group consisting of a semiconductor wafer, paper, and a web of material.

31. The system of claim 23 wherein the first pattern, the second pattern, the third pattern, and the fourth pattern each comprise a man-made pattern.

32. The system of claim 23 wherein the first pattern naturally occurs on the first substrate, wherein the second pattern naturally occurs on the second substrate, wherein the third pattern naturally occurs on the third substrate, and wherein the fourth pattern naturally occurs on the fourth substrate.

33. A computer-readable medium having computer-executable instructions for performing a method of calculating first and second displacements, comprising:

receiving a first frame that comprises a first pattern embodied in a first substrate and a second pattern embodied in a second substrate;

receiving a second frame that comprises a third pattern embodied in a third substrate and substantially identical to the first pattern, and a fourth pattern embodied in a fourth substrate and substantially identical to the second pattern;

identifying the first pattern and the second pattern in the first frame;

identifying the third pattern and the fourth pattern in the second frame;

calculating the first displacement between the first pattern and the third pattern using the first frame and the second frame; and

calculating the second displacement between the second pattern and the fourth pattern using the first frame and the second frame.

34. The computer-readable medium of claim 33 wherein the computer-readable medium has computer-executable instructions for:

calculating a third displacement using the first displacement and the second displacement.

35. The computer-readable medium of claim 33 wherein the computer-readable medium has computer-executable instructions for:

providing the first displacement and the second displacement to an adjustment system that is configured to adjust a position of the third substrate and a position of the fourth substrate using the first displacement and the second displacement.

36. The computer-readable medium of claim 33 wherein the computer-readable medium has computer-executable instructions for:

providing the first displacement and the second displacement to a position adjustment system configured to adjust a position of a functional unit with respect to the third substrate and the fourth substrate using the first displacement and the second displacement.

37. The computer-readable medium of claim 33 wherein the first substrate includes the third substrate, wherein the second substrate includes the fourth substrate, wherein the first pattern includes the third pattern, and wherein the second pattern includes the fourth pattern.