Thin membrane transducer
First Claim
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1. A sensor, comprising a substrate and a membrane connected to said substrate and having a membrane surface, said membrane surface having a coating comprising a reaction agent for interacting with a medium in a manner to deflect said membrane relative to said substrate, a first electrode on the substrate and spaced from the membrane, and a second electrode on or a part of the membrane and from which first electrode and second electrode a capacitance measurement can be made.
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Abstract
A transducer includes a substrate and a thin membrane having a shape that can be deflected relative to the substrate to provide an amount of membrane deflection useful for sensing or actuation purposes.
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Citations
20 Claims
- 1. A sensor, comprising a substrate and a membrane connected to said substrate and having a membrane surface, said membrane surface having a coating comprising a reaction agent for interacting with a medium in a manner to deflect said membrane relative to said substrate, a first electrode on the substrate and spaced from the membrane, and a second electrode on or a part of the membrane and from which first electrode and second electrode a capacitance measurement can be made.
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16. A sensor comprising a substrate and a membrane connected to said substrate and having a surface with a coating comprising a reaction agent for interacting with a medium a manner to deflect said membrane relative to said substrate, a first electrode on the substrate and spaced from the membrane, and a second electrode on or a part of the membrane and from which first electrode and second electrode a capacitance measurement can be made, and further having a dummy membrane connected to the substrate and having a surface on which no interaction with said medium occurs, a third electrode on the substrate spaced from the dummy membrane, and a fourth electrode on or a part of the dummy membrane and from which third electrode and fourth electrode a capacitance measurement can be made.
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17. A transducer, comprising a substrate and a membrane having a surface with a coating comprising a reaction agent and peripherally connected to said substrate and being deflectable relative to said substrate by an interaction of the reaction agent with a medium occurring on said membrane surface, a first electrode on the substrate and spaced from the membrane, and a second electrode on or part of the membrane and from which first electrode and second electrode a capacitance measurement can be made.
- 18. A method of sensing, comprising producing an interaction between a medium and a reaction agent of a coating on a surface of a membrane connected to a substrate, deflecting the membrane in response to the interaction, and detecting the deflection of the membrane by measuring a change in capacitance between a first electrode on the substrate and a second electrode on or a part of the membrane.
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20. A method of sensing, comprising producing an interaction between a medium and a reaction agent of a coating on a surface of a membrane connected to a substrate while said membrane is inflated by gas pressure to impart a deflectable shape thereto, deflecting the membrane in response to the interaction, and detecting the deflection of the membrane by measuring a change in capacitance between a first electrode on the substrate and a second electrode on or a part of the membrane.
Specification