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Thin membrane transducer

  • US 7,086,288 B2
  • Filed: 11/26/2003
  • Issued: 08/08/2006
  • Est. Priority Date: 11/27/2002
  • Status: Expired due to Fees
First Claim
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1. A sensor, comprising a substrate and a membrane connected to said substrate and having a membrane surface, said membrane surface having a coating comprising a reaction agent for interacting with a medium in a manner to deflect said membrane relative to said substrate, a first electrode on the substrate and spaced from the membrane, and a second electrode on or a part of the membrane and from which first electrode and second electrode a capacitance measurement can be made.

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