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Post-CMP washing liquid composition

  • US 7,087,562 B2
  • Filed: 05/09/2003
  • Issued: 08/08/2006
  • Est. Priority Date: 05/16/2002
  • Status: Expired due to Fees
First Claim
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1. A post-OMP washing liquid composition consisting of one type or two or more types of aliphatic polycarboxylic acids and one type or two or more types selected from the group consisting of glyoxylic acid, ascorbic acid, glucose, fructose, lactose, and mannose, the washing liquid composition having a pH of less than 3.0.

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