Lithographic actuator mechanism, lithographic apparatus, and device manufacturing method

• US 7,088,428 B2
• Filed: 03/11/2004
• Issued: 08/08/2006
• Est. Priority Date: 03/11/2003
• Status: Active Grant

• Current Assignee: ASML Netherlands BV (ASML Holding NV)
• Original Assignee: ASML Netherlands BV (ASML Holding NV)
• Inventors: Hol, Sven Antoin Johan, Buis, Edwin Johan, Van Der Schoot, Harmen Klaas, Vreugdewater, Patricia
• Primary Examiner(s): Kim, Peter B.
• Application Number:
  US10/797,618
• Publication Number:
  US 20040218167A1
• Time in Patent Office: 880 Days
• Field of Search: 355/72, 355/75, 355/53, 355/77, 310/12, 310/58, 310/60, 335/302, 336/200
• US Class Current: 355/72
• CPC Class Codes: G03F 7/70758 Drive means, e.g. actuators, motors for long- or short-stroke modules or fine or coarse driving
• CPC Class Codes: G03F 7/70858 Environment aspects, e.g. pressure of beam-path gas, temperature pollution aspects G03F7/70916
• CPC Class Codes: H02K 41/0356 moving along a straight path
• CPC Class Codes: H02K 9/227 Heat sinks

Abstract

Lorentz actuators generate heat due to electrical dissipation in the field coils. As the field through the coils changes, eddy currents are induced in cooling elements leading to undesirable damping forces and heating. The present invention provides an improved design that reduces eddy currents by incorporating slits in the cooling element. Slits are preferably perpendicular to the induced electric field and parallel to each other, and reduce the magnitude of the eddy currents by forcing them to take paths of higher electrical resistance.

Claims

1. A lithographic apparatus, comprising:

a radiation system configured to provide a beam of radiation;

a support configured to support a patterning device adapted to impart a desired pattern to the beam of radiation;

a substrate holder configured to hold a substrate;

a projection system that projects the patterned beam onto a target portion of the substrate; and

an actuator configured to position at least one part within the radiation system, the support, the substrate holder, or the projection system, the actuator comprising a coil arrangement in thermal contact with a cooling element,

said cooling element being provided with one or more slits configured to increase electrical resistance of eddy current paths.

2. A lithographic apparatus according to claim 1, wherein the slits are arranged to be substantially parallel to each other.

3. A lithographic apparatus according to claim 1, wherein the slits are arranged to be substantially perpendicular to the direction of an induced electric field.

4. A lithographic apparatus according to claim 1, wherein the slits are arranged to be substantially parallel to the direction of an induced electric field.

5. A lithographic apparatus according to claim 1, wherein the slits are arranged to be at an oblique angle, to the direction of an induced electric field.

6. A lithographic apparatus according claim 1, wherein the slit lengths are limited so as not to extend across an entire length of the cooling element.

7. A lithographic apparatus according to claim 1, wherein adjacent slits extend from opposite sides of the cooling element.

8. A lithographic apparatus according to claim 1, wherein cooling channels are integrated with the slits to provide a plurality of parallel paths arranged to reduce flow impedance.

9. A lithographic apparatus according to claim 1, wherein cooling channels are arranged in a substantially symmetrical network to provide uniform coverage of the cooling element.

10. A lithographic apparatus according to claim 1, wherein the slits are filled to protect from outgassing from the coil.

11. A device manufacturing method, comprising:

supporting a substrate by a substrate holder;

providing a beam of radiation using an illumination system;

imparting a desired pattern onto the beam of radiation by a patterning device supported by a support;

projecting the patterned beam of radiation onto a target portion of the substrate via a projection system; and

positioning at least a part of one of the radiation system, the support, the substrate holder, and the projection system by an actuator, the actuator comprising a coil arrangement in thermal contact with a cooling element, wherein the cooling element is provided with one or more slits configured to increase electrical resistance of eddy current paths.

12. A lithographic actuating mechanism, comprising:

a magnet assembly;

a cooling element; and

a coil arrangement in thermal contact with said cooling element;

said cooling element being provided with one or more slits configured to increase electrical resistance of eddy current paths.

13. A lithographic actuating mechanism according to claim 12, wherein the slits are arranged to be substantially parallel to each other.

14. A lithographic actuating mechanism according to claim 12, wherein the slits are arranged to be substantially perpendicular to the direction of an induced electric field.

15. A lithographic actuating mechanism according to claim 12, wherein the slits are arranged to be substantially parallel to the direction of an induced electric field.

16. A lithographic actuating mechanism according to claim 12, wherein the slits are arranged to be at an oblique angle, to the direction of an induced electric field.

17. A lithographic actuating mechanism according to claim 12, wherein the slit lengths are limited so as not to extend across an entire length of the cooling element.

18. A lithographic actuating mechanism according to claim 12, wherein adjacent slits extend from opposite sides of the cooling element.

19. A lithographic actuating mechanism according to claim 12, wherein cooling channels are integrated with the slits to provide a plurality of parallel paths arranged to reduce flow impedance.

20. A lithographic actuating mechanism according to claim 12, wherein cooling channels are arranged in a substantially symmetrical network to provide uniform coverage of the cooling element.

21. A lithographic actuating mechanism according to claim 12, wherein the slits are filled to protect from outgassing from the coil.