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Micro movable mechanism system and control method for the same

  • US 7,088,492 B2
  • Filed: 10/09/2002
  • Issued: 08/08/2006
  • Est. Priority Date: 10/11/2001
  • Status: Expired due to Fees
First Claim
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1. A micro movable mechanism system comprising:

  • a micro movable mechanism;

    a target position generating section which generates a signal indicative a target position of said micro movable mechanism;

    a nonlinear control unit which outputs a controller output signal indicating a control value based on a difference between said target position signal and a signal indicating a current position of said micro movable mechanism; and

    a root correction section which drives said micro movable mechanism based on a signal proportional to a square root of said control value.

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