Temperature insensitive pressure sensor
First Claim
1. A pressure sensor for sensing a fluid pressure, the pressure sensor comprising:
- first and second chambers having first and second flexible membranes respectively, the first and second flexible membranes configured to deflect in response to pressure differences within the first and second chambers respectively, the first membrane arranged for exposure to the fluid pressure and the second membrane sealed from the fluid pressure; and
,associated circuitry for converting the deflection of the first flexible membrane into an output signal related to the fluid pressure, and converting the deflection of the second membrane into an adjustment of the output signal to compensate for the temperature of the sensor.
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Accused Products
Abstract
A pressure sensor that compensates for variations in temperature by having first (53) and second (51) chambers with first and second respective flexible membranes. The first and second flexible membranes deflect in response to pressure differences within the first and second chambers respectively. The first membrane is exposed to the fluid pressure (66) to be measured, such as the air pressure in a tire. The second membrane sealed from the fluid pressure, and, associated circuitry converts the deflection of the first flexible membrane into an output signal related to the fluid pressure, and converts the deflection of the second membrane into an adjustment of the output signal to compensate for the temperature of the sensor.
By sealing the second chamber from the tire pressure, the deflection of the second membrane can be determined as a function of temperature. This can be used to calibrate the output signal from the first chamber to remove the effects of temperature variation.
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Citations
40 Claims
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1. A pressure sensor for sensing a fluid pressure, the pressure sensor comprising:
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first and second chambers having first and second flexible membranes respectively, the first and second flexible membranes configured to deflect in response to pressure differences within the first and second chambers respectively, the first membrane arranged for exposure to the fluid pressure and the second membrane sealed from the fluid pressure; and
,associated circuitry for converting the deflection of the first flexible membrane into an output signal related to the fluid pressure, and converting the deflection of the second membrane into an adjustment of the output signal to compensate for the temperature of the sensor. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40)
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Specification