Integrated electrostatic peristaltic pump method and apparatus
First Claim
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1. An electrostatic fluid regulating device comprising a plurality of fluid regulating elements numbered from 1 through N disposed on a substrate;
- each of the fluid regulating elements comprising;
a fluid channel comprises an inlet at a first end and an outlet at a second end, the fluid channel being disposed overlying the substrate;
an actuation region disposed overlying the substrate and coupled to the fluid channel;
a polymer based diaphragm coupled between the fluid channel and the actuation region;
a first electrode coupled to the substrate and to the actuation region;
a second electrode coupled to the polymer based diaphragm;
an electrical power source coupled between the first electrode and the second electrode and substantially free from causing an electric field within the fluid channel region; and
wherein the first electrode and the second electrode are physically separated from each other by at least the actuation region, and wherein the first electrode and the second electrode provide electrode movement to vary the height of the fluid channel when a potential difference arises between them.
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Abstract
An electrostatic fluid regulating device and methods. The device has a substrate. The device also has a first electrode coupled to the substrate. The device has a polymer based diaphragm. A second electrode is coupled to the diaphragm. A polymer based fluid chamber is coupled to the diaphragm. The device also has an inlet coupled to the polymer based fluid chamber and an outlet coupled to the polymer based fluid chamber.
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Citations
27 Claims
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1. An electrostatic fluid regulating device comprising a plurality of fluid regulating elements numbered from 1 through N disposed on a substrate;
- each of the fluid regulating elements comprising;
a fluid channel comprises an inlet at a first end and an outlet at a second end, the fluid channel being disposed overlying the substrate; an actuation region disposed overlying the substrate and coupled to the fluid channel; a polymer based diaphragm coupled between the fluid channel and the actuation region; a first electrode coupled to the substrate and to the actuation region;
a second electrode coupled to the polymer based diaphragm;
an electrical power source coupled between the first electrode and the second electrode and substantially free from causing an electric field within the fluid channel region; andwherein the first electrode and the second electrode are physically separated from each other by at least the actuation region, and wherein the first electrode and the second electrode provide electrode movement to vary the height of the fluid channel when a potential difference arises between them. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21)
- each of the fluid regulating elements comprising;
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22. A method of flowing a fluid comprising:
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providing an electrostatic fluid regulating device comprising a plurality of fluid regulating elements numbered from 1 through N disposed on a substrate, each of the fluid regulating elements comprising, a fluid channel comprises an inlet at a first end and an outlet at a second end, the fluid channel being disposed overlying the substrate, an actuation region disposed overlying the substrate and coupled to the fluid channel, a polymer based diaphragm coupled between the fluid channel and the actuation region, and a first electrode coupled to the substrate and to the actuation region; a second electrode coupled to the polymer based diaphragm such that the first electrode and the second electrode are physically separated from each other by at least the actuation region; and applying electrical power from a source in a sequence to create a potential difference between the first and second electrodes of first, second, and third fluid regulating elements in turn, the first and second electrodes provide electrode movement to vary the height of the fluid channel when a potential difference arises between them such that contents of the fluid channel region are substantially free from an applied electric field. - View Dependent Claims (23, 24, 25, 26, 27)
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Specification