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Single phase fluid imprint lithography method

  • US 7,090,716 B2
  • Filed: 10/02/2003
  • Issued: 08/15/2006
  • Est. Priority Date: 10/02/2003
  • Status: Expired due to Term
First Claim
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1. A method for reducing gases present in a layer of viscous liquid deposited on a substrate, said method comprising:

  • varying a transport of gases proximate to said viscous liquid to increase said transport of said gases in said viscous liquid.

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