Architecture of a reflective spatial light modulator
First Claim
Patent Images
1. A spatial light modulator for use in display applications, comprising:
- a control circuitry substrate including;
a plurality of electrodes for receiving selected voltages;
a memory buffer;
a video display controller for processing video signals; and
a pulse width modulation array; and
a mirror array substrate bonded to the control circuitry substrate, the mirror array substrate including;
an array of video display pixels comprising a plurality of micro mirror plates;
a spacer support frame for spacing the plurality of micro mirror plates apart from the control circuitry substrate and supporting the micro mirror plates; and
a plurality of hinges, each hinge directly connected to the spacer support frame and to a micro mirror plate, for allowing the micro mirror plate to rotate relative to the spacer support frame about an axis defined by the hinge.
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Abstract
A micro-mirror array fabricated on one substrate is bonded to a second substrate that includes addressing electrodes and control circuitry. In one embodiment, the micro mirror array is fabricated from a substrate that is a single crystal material. There is enough area beneath the micro mirror array for electrodes and control circuitry, including memory buffers and a pulse width modulation array to be fabricated on the second substrate.
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Citations
21 Claims
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1. A spatial light modulator for use in display applications, comprising:
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a control circuitry substrate including; a plurality of electrodes for receiving selected voltages; a memory buffer; a video display controller for processing video signals; and a pulse width modulation array; and a mirror array substrate bonded to the control circuitry substrate, the mirror array substrate including; an array of video display pixels comprising a plurality of micro mirror plates; a spacer support frame for spacing the plurality of micro mirror plates apart from the control circuitry substrate and supporting the micro mirror plates; and a plurality of hinges, each hinge directly connected to the spacer support frame and to a micro mirror plate, for allowing the micro mirror plate to rotate relative to the spacer support frame about an axis defined by the hinge. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A single-chip spatial light modulator for use in a video display, comprising:
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a control circuitry substrate including; an electrode layer with a plurality of electrodes for receiving selected voltages; and a control circuitry layer including line memory buffers and a pulse width modulation array; and a mirror array substrate bonded to the control circuitry substrate, the mirror array substrate including an array of video pixel elements comprising a plurality of micro mirrors, wherein the plurality of micro mirrors comprise; a plurality of micro mirror plates; a spacer support frame for spacing the plurality of micro mirror plates apart from the control circuitry substrate and supporting the micro mirror plates; and a plurality of hinges, each hinge directly connected to the spacer support frame and to a micro mirror plate, for allowing the micro mirror plate to rotate relative to the spacer support frame about an axis defined by the hinge. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16, 17)
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18. A spatial light modulator for use in a video display engine having both a micro mirror array and control circuitry integrated on one chip for improved data transfer rates, comprising:
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a mirror array substrate including; a video pixel array comprising a plurality of micro mirror plates; a spacer support frame for spacing the plurality of micro mirror plates apart from the control circuitry substrate and supporting the micro mirror plates; and a plurality of hinges, each hinge directly connected to the spacer support frame and to a micro mirror plate, for allowing the micro mirror plate to rotate relative to the spacer support frame about an axis defined by the hinge; and a control circuitry substrate including; a control circuitry layer with control circuitry including a plurality of line memory buffers and a pulse width modulation array; and an electrode layer with a plurality of electrodes connected to the control circuitry for receiving selected voltages from the control circuitry and each electrode is associated with a micro mirror plate of the mirror array substrate so that the selected voltage received by an electrode creates an electric field that controls the rotation of the associated micro mirror plate and a direction at which light is reflected from the associated micro mirror plate; and wherein the control circuitry and the electrodes of the control circuitry substrate are fabricated and then the control circuitry substrate is bonded to the mirror my substrate. - View Dependent Claims (19, 20, 21)
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Specification