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Air gap autogenesis method

  • US 7,092,142 B2
  • Filed: 02/16/2006
  • Issued: 08/15/2006
  • Est. Priority Date: 02/26/2002
  • Status: Expired due to Fees
First Claim
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1. A method for creating an air gap between first and second layers separated by a third layer comprising the steps of:

  • applying an energy signal in order to cause the first and second layers to converge towards each other at a predetermined location resulting in a thinning of the third layer; and

    removing the energy signal to thereby permit the first and second layers to rebound to a predetermined distance from each other, leaving an air gap at the predetermined location between the first layer and the thinned third layer.

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