Microlens arrays having high focusing efficiency

• US 7,092,165 B2
• Filed: 12/17/2004
• Issued: 08/15/2006
• Est. Priority Date: 07/31/2000
• Status: Expired due to Term

• Current Assignee: Corning Incorporated
• Original Assignee: Corning Incorporated
• Inventors: Morris, G. Michael, Sales, Tasso R. M.
• Primary Examiner(s): SCHWARTZ, JORDAN MARC
• Application Number:
  US11/016,185
• Publication Number:
  US 20050146795A1
• Time in Patent Office: 606 Days
• Field of Search: 359/626, 359/625, 359/619
• US Class Current: 359/626
• CPC Class Codes: G02B 3/0012 characterised by the manufacturing method
• CPC Class Codes: G02B 3/0043 Inhomogeneous or irregular arrays, e.g. varying shape, size, height
• CPC Class Codes: H01L 27/14627 Microlenses
• CPC Class Codes: H01L 27/14685 Process for coatings or optical elements

Abstract

Microlens arrays (105) having high focusing efficiencies are provided. The high focusing efficiencies are achieved by accurately producing the individual microlenses making up the array at high fill factors. Arrays of positive microlenses are produced by forming a master having a concave surface-relief pattern (101) in a positive photoresist (21) using direct laser writing. Through this approach, the problems associated with the convolution of a finite laser beam with a desired profile for a microlens are overcome. The microlens arrays of the invention have focusing efficiencies of at least 75%.

Claims

1. A microlens array comprising a plurality of unit cells and a plurality of microlenses, one microlens per unit cell, wherein:

(a) the unit cells are close packed;

(b) the array has a fill factor of at least 95 percent;

(c) the array has a focusing efficiency of at least 75 percent; and

(d) at least two of the microlenses differ from one another randomly.

2. The microlens array of claim 1 wherein the array has a focusing efficiency of at least 85 percent.

3. The microlens array of claim 1 wherein the array has a focusing efficiency of at least 95 percent.

4. The microlens array of claim 1 wherein the array has a fill factor substantially equal to 100 percent.

5. The microlens array of claim 1 wherein the microlenses are convex microlenses.

6. The microlens array of claim 1 wherein at least some of the microlenses are anamorphic.