Polymer based tunneling sensor

• US 7,094,622 B1
• Filed: 08/27/2003
• Issued: 08/22/2006
• Est. Priority Date: 08/27/2003
• Status: Expired due to Fees

• Current Assignee: Louisiana Tech University Foundation (Louisiana Tech University)
• Original Assignee: Louisiana Tech University Foundation (Louisiana Tech University)
• Inventors: Zhao, Yongjun, Wang, Jing, Cui, Tianhong
• Primary Examiner(s): Picardat, Kevin M.
• Application Number:
  US10/648,927
• Time in Patent Office: 1,091 Days
• Field of Search: 438/57, 438/59, 438/63, 438/64, 438/66, 438/67, 438/82
• US Class Current: 438/57
• CPC Class Codes: B81B 2201/0292 Sensors not provided for in B81B2201/0207 - B81B2201/0285
• CPC Class Codes: B81C 2203/038 Bonding techniques not provided for in B81C2203/031 - B81C2203/037
• CPC Class Codes: B81C 99/0085 using moulds and master templates, e.g. for hot-embossing
• CPC Class Codes: G01P 15/0802 Details
• CPC Class Codes: G01P 15/0894 by non-contact electron transfer, i.e. electron tunneling

Abstract

A process for fabricating a polymer based circuit by the following steps. A mold of a design is formed through a lithography process. The design is transferred to a polymer substrate through a hot embossing process. A metal layer is then deposited over at least part of said design and at least one electrical lead is connected to said metal layer.

Claims

1. A polymer based micro-machine formed by the steps comprising:

a. forming a first and second mold, each having a design formed through a lithography process;

b. transferring said design on each mold to a separate polymer substrate through a hot embossing process;

c. depositing a metal layer over at least part of said designs; and

d. connecting at least one electrical lead to said metal layer.

2. The polymer based micro-machine according to claim 1, wherein said design is a structure for a tunneling current sensor.

3. The polymer based micro-machine according to claim 1, further including the step of adhering said separate substrates together.

4. The polymer based micro-machine according to claim 1, further including the step of back etching at least one of said polymer substrates.

5. The polymer based micro-machine according to claim 1, wherein said step of transferring said design includes using PMMA as the polymer substrate.

6. The polymer based micro-machine according to claim 1, wherein said metal layer is deposited over substantially all of a surface containing said design and is etched to conform to said design.

7. The polymer based micro-machine according to claim 1, wherein said design structure is a comb drive.

8. The polymer based micro-machine according to claim 1, wherein said separate polymer substrates are metalized and bonded together.

9. A polymer based micro-machine formed by the steps comprising:

a. forming a mold of a comb drive structure through a lithography process;

b. transferring said design to a polymer substrate through a hot embossing process;

c. depositing a metal layer over at least part of said design; and

d. connecting at least one electrical lead to said metal layer.

10. A polymer based micro-machine formed by the steps comprising:

a. forming a mold of a design for a tunneling current sensor through a lithography process;

b. transferring said design to a polymer substrate through a hot embossing process;

c. depositing a metal layer over at least part of said design; and

d. connecting at least one electrical lead to said metal layer.