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Anisotropic conductive connector, probe member, wafer inspecting device, and wafer inspecting method

  • US 7,095,241 B2
  • Filed: 08/07/2003
  • Issued: 08/22/2006
  • Est. Priority Date: 08/09/2002
  • Status: Expired due to Term
First Claim
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1. An anisotropically conductive connector for electrically connecting a circuit board for inspection to a wafer by being arranged on the surface of the circuit board for inspection for conducting electrical inspection of each of a plurality of integrated circuits formed on the wafer in a state of the wafer, which comprises:

  • a frame plate, in which a plurality of anisotropically conductive film-arranging holes each extending in a thickness-wise direction of the frame plate have been formed correspondingly to electrode regions, in which electrodes to be inspected have been arranged, in all or part of the integrated circuits formed on the wafer, which is an object of inspection, and a plurality of elastic anisotropically conductive films arranged in the respective anisotropically conductive film-arranging holes in this frame plate and each supported by a peripheral edge extending about the anisotropically conductive film-arranging hole,wherein each of the elastic anisotropically conductive films is composed of a functional part having a plurality of conductive parts for connection arranged correspondingly to the electrodes to be inspected in the integrated circuits formed on the wafer, which is the object of inspection, containing conductive particles exhibiting magnetism at a high density and extending in the thickness-wise direction of the film and an insulating part mutually insulating these conductive parts for connection, and a part to be supported integrally formed at a peripheral edge of the functional part and fixed to the peripheral edge extending about the anisotropically conductive film-arranging hole in the frame plate, andwherein the elastic anisotropically conductive film has initial properties that supposing that the total number of the conductive parts for connection is Y, an electric resistance of the conductive part for connection in a state that a load of Y×

    1 g has been applied to the elastic anisotropically conductive film in a thickness-wise direction thereof is R1g, and an electric resistance of the conductive part for connection in a state that a load of Y×

    6 g has been applied to the elastic anisotropically conductive film in the thickness-wise direction is R6g, the number of conductive parts for connection that have a value of R1g is lower than 1 Ω

    is at least 90% of the total number of the conductive parts for connection, the number of conductive parts for connection that have a value of R6g is lower than 0.1 Ω

    is at least 95% of the total number of the conductive parts for connection, and the number of conductive parts for connection that have a value of R6g that is at least 0.5 Ω

    is at most 1% of the total number of the conductive parts for connection.

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