Lithographic linear motor, lithographic apparatus, and device manufacturing method

• US 7,095,485 B2
• Filed: 03/11/2004
• Issued: 08/22/2006
• Est. Priority Date: 03/11/2003
• Status: Active Grant

• Current Assignee: ASML Netherlands BV (ASML Holding NV)
• Original Assignee: ASML Netherlands BV (ASML Holding NV)
• Inventors: Loopstra, Erik Roelof, Hol, Sven Antoin Johan, Compter, Johan Cornelis, Vreugdewater, Patricia
• Primary Examiner(s): Fuller, Rodney
• Assistant Examiner(s): GUTIERREZ, KEVIN C
• Application Number:
  US10/797,662
• Publication Number:
  US 20040246458A1
• Time in Patent Office: 894 Days
• Field of Search: 355/72, 355/75, 355/53, 310 12- 14, 310/46, 378/34, 378/35
• US Class Current: 355/72
• CPC Class Codes: G03F 7/70758 Drive means, e.g. actuators, motors for long- or short-stroke modules or fine or coarse driving
• CPC Class Codes: H02K 2201/18 Machines moving with multiple degrees of freedom
• CPC Class Codes: H02K 41/031 of the permanent magnet type

Abstract

A linear motor having a high driving force, high efficiency and low normal force comprises two opposed magnet tracks and an armature comprising three open coil sets. The linear motor may be used to drive a stage, such as, for example, a mask or wafer stage, in a lithographic apparatus.

Claims

1. A lithographic apparatus, comprising:

a radiation system configured to supplying a beam of radiation;

a support structure for supporting a patterning device that imparts a desired pattern to said beam of radiation;

a substrate holder configured to hold a substrate;

a projection system configured to project said patterned beam of radiation onto a target portion of said substrate; and

a linear motor configured to move one of said support structure and said substrate table, said linear motor comprising;

a first magnetic plate;

a second magnetic plate arranged opposite to said first magnetic plate;

an open coil unit, interposed between said first and second magnetic plates, including a plurality of coils wound about respective ferromagnetic cores; and

a pair of ferromagnetic members, each having no coil wound thereon and spaced apart from the outermost coils on each side of the coil unit,

wherein said first and second magnetic plates and said coil unit are relatively moveable.

2. The lithographic apparatus of claim 1, wherein said coil unit comprises three coil sets with each coil set comprising one or more coils.

3. The lithographic apparatus of claim 1, wherein said ferromagnetic cores project beyond said coils wound around them, and a coolant conduit is provided between said cores and in thermal contact with said coils.

4. The lithographic apparatus of claim 3, wherein said coolant conduit is formed of a ceramic material.

5. The lithographic apparatus of claim 4, wherein said coils comprise a foil.

6. The lithographic apparatus of claim 1, wherein said magnetic plates comprise Halbach magnets.

7. The lithographic apparatus of claim 1, wherein said first and second magnetic plates are inclined towards each other.

8. The lithographic apparatus of claim 7, further including means for varying the commutation angle applied to coils of said coil unit.

9. A device manufacturing method, comprising:

providing a substrate;

providing a beam of radiation using a radiation system;

imparting a desired pattern onto said beam of radiation by employing a patterning device;

projecting said patterned beam of radiation onto a target portion of said substrate; and

displacing at least one of said substrate and said patterning device by using a linear motor, said linear motor comprising first and second magnetic plates that are arranged opposite to each other, an open coil unit between said first and second magnetic plates, and a pair of ferromagnetic members, each having no coil wound thereon and spaced apart from the outermost coils on each side of the coil unit, said coil unit comprising a plurality of coils wound about respective ferromagnetic cores,

wherein said magnetic plates and said coil unit are relatively moveable.

10. A linear motor, comprising:

a first magnetic plate;

a second magnetic plate arranged opposite to said first magnetic plate; and

an open coil unit, interposed between said first and second magnetic plates, including a plurality of coils wound about respective ferromagnetic cores; and

a pair of ferromagnetic members, each having no coil wound thereon and spaced apart from the outermost coils on each side of the coil unit,

wherein said first and second magnetic plates and said coil unit are relatively moveable.

11. The linear motor of claim 10, wherein said coil unit comprises three coil sets with each coil set comprising one or more coils.

12. The linear motor of claim 10, wherein said ferromagnetic cores project beyond said coils wound around them, and a coolant conduit is provided between said cores and in thermal contact with said coils.

13. The linear motor of claim 12, wherein said coolant conduit is formed of a ceramic material.

14. The linear motor of claim 13, wherein said coils comprise a foil.

15. The linear motor of claim 10, wherein said magnetic plates comprise Halbach magnets.

16. The linear motor of claim 10, wherein said first and second magnetic plates are inclined towards each other.

17. The linear motor of claim 16, further including means for varying the commutation angle applied to coils of said coil unit.