In-line annular seal-based pressure device
First Claim
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1. A pressure sensor for measuring a pressure of a process fluid, comprising:
- a contiguous electrically conductive vessel for receiving the process fluid;
an electrical insulator extending over an inner wall of the electrically conductive vessel;
an electrode integral with the electrical insulator; and
a diaphragm that extends at least partially over the electrode and mates flush with the inner wall of the vessel and generally parallel with flow of process fluid through the vessel and that is configured to move relative to the electrode in response to the pressure of the process fluid;
wherein an electrical capacitance between the electrode and the diaphragm is related to a pressure of the process fluid and wherein the diaphragm defines a cavity between the diaphragm and the electrode, the cavity containing a vacuum.
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Abstract
A pressure sensor for measuring a pressure of a process fluid includes a vessel, an electrode and a diaphragm. The vessel receives the process fluid. The electrode is integral with an inner wall of the vessel. The diaphragm extends at least partially over the electrode and is configured to move relative to the electrode in response to the pressure of the process fluid. An electrical capacitance between the electrode and the diaphragm is related to the pressure of the process fluid.
47 Citations
26 Claims
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1. A pressure sensor for measuring a pressure of a process fluid, comprising:
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a contiguous electrically conductive vessel for receiving the process fluid; an electrical insulator extending over an inner wall of the electrically conductive vessel; an electrode integral with the electrical insulator; and a diaphragm that extends at least partially over the electrode and mates flush with the inner wall of the vessel and generally parallel with flow of process fluid through the vessel and that is configured to move relative to the electrode in response to the pressure of the process fluid; wherein an electrical capacitance between the electrode and the diaphragm is related to a pressure of the process fluid and wherein the diaphragm defines a cavity between the diaphragm and the electrode, the cavity containing a vacuum. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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16. A differential pressure sensor for measuring a differential pressure of a process fluid in a conduit, comprising:
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a flow restriction element integral with a conductive inner wall of the conduit and adapted to produce a pressure drop when placed in-line with a fluid flow; a first electrical insulator integral with a contiguous section of the conductive inner wall of the conduit; a first capacitor having a first capacitance and including a first electrode integral with the first electrical insulator and positioned upstream from the flow restriction element and in-line with the process fluid the first capacitor comprising a first dielectric between the first electrode and a second electrode; a second electrical insulator integral with the contiguous section of the conductive inner wall of the conduit; a second capacitor having a second capacitance and including a third electrode integral with the second electrical insulator and positioned downstream from the flow restriction element and in-line with the process fluid the second capacitor comprising a second dielectric between the third electrode and a fourth electrode; wherein the first capacitance and the second capacitance are related to the differential pressure of the process fluid and wherein each of the first dielectric and the second dielectric is a vacuum. - View Dependent Claims (17, 18, 19, 20, 21, 22, 23, 24, 25, 26)
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Specification