Method of manufacturing carbon nanotube semiconductor device

• US 7,098,151 B2
• Filed: 07/29/2003
• Issued: 08/29/2006
• Est. Priority Date: 08/01/2002
• Status: Expired due to Fees

• Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Original Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Inventors: Moriya, Koji, Yamashita, Akio
• Primary Examiner(s): LE, DUNG ANH
• Application Number:
  US10/628,239
• Publication Number:
  US 20040023514A1
• Time in Patent Office: 1,127 Days
• Field of Search: 438/780, 438/778, 438/779, 438/195, 438196-197
• US Class Current: 438/780
• CPC Class Codes: B82Y 10/00 Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
• CPC Class Codes: H01L 21/02164 the material being a silicon oxide, e.g. SiO2
• CPC Class Codes: H01L 21/0217 the material being a silicon nitride not containing oxygen, e.g. SixNy or SixByNz H01L21/02126 and H01L21/0214 take precedence
• CPC Class Codes: H01L 21/022 the layer being a laminate, i.e. composed of sublayers, e.g. stacks of alternating high-k metal oxides adhesion layers or buffer layers H01L21/02304, H01L21/02362
• CPC Class Codes: H01L 21/3144 on silicon
• CPC Class Codes: H01L 21/31612 on a silicon body
• CPC Class Codes: H01L 21/3185 of siliconnitrides
• CPC Class Codes: H10K 10/464 Lateral top-gate IGFETs comprising only a single gate
• CPC Class Codes: H10K 10/466 Lateral bottom-gate IGFETs comprising only a single gate
• CPC Class Codes: H10K 85/221 Carbon nanotubes
• CPC Class Codes: H10K 85/615 Polycyclic condensed aromatic hydrocarbons, e.g. anthracene
• CPC Class Codes: Y10T 428/30 Self-sustaining carbon mass or layer with impregnant or other layer

Abstract

Provided is a method of controlling an alignment direction of CNTs in manufacturing a carbon nanotube semiconductor device using the CNTs for a channel region formed between a source electrode and a drain electrode. In manufacturing a carbon nanotube semiconductor device including a gate electrode, a gate insulating film, a source electrode, a drain electrode, a CNT layer formed between the source electrode and the drain electrode in contact therewith, the method conducts: dropping a CNT solution obtained by dispersing CNTs in a solvent onto a region between the source electrode and the drain electrode while an alternating current voltage is applied between the source electrode and the drain electrode; and removing the solvent to control an orientation of the CNTs in the CNT layer.

Claims

1. A method of manufacturing a carbon nanotube semiconductor device, comprising:

dropping a solution containing a carbon nanotube with conductor property and a carbon nanotube with semiconductor property onto a first electrode, a second electrode, and a region between the first electrode and the second electrode and overlapped with a third electrode through an insulating film while an alternating current voltage is applied between the first electrode and the second electrode which are located over the insulating film over the third electrode;

controlling the carbon nanotubes in a predetermined alignment direction; and

applying a direct current voltage between the first electrode and the second electrode to remove the carbon nanotube with conductor property,

wherein the first electrode is connected with the second electrode through the carbon nanotube with semiconductor property in the carbon nanotube semiconductor device.

2. A method of manufacturing a carbon nanotube semiconductor device according to claim 1, further comprising rubbing a surface of the first electrode, a surface of the second electrode, and a surface of the insulating film between the first electrode and the second electrode overlapped with the third electrode.

3. A method of manufacturing a carbon nanotube semiconductor device according to claim 1, further comprising:

forming an alignment film over the first electrode, the second electrode, and the insulating film between the first electrode and the second electrode; and

rubbing a surface of the alignment film.

4. A method of manufacturing a carbon nanotube semiconductor device according to claim 1, wherein a frequency of the alternating current voltage is equal to or larger than 1 MHz.

5. A method of manufacturing a carbon nanotube semiconductor device according to claim 1, wherein a concentration of carbon nanotubes contained in the carbon nanotube solution is equal to or lower than 0.0005%.

6. A method of manufacturing a carbon nanotube semiconductor device, comprising:

forming a gate electrode over a substrate;

forming a gate insulating film over the gate electrode and the substrate;

forming a source electrode and a drain electrode over the gate insulating film;

applying a carbon nanotube solution comprising a solvent, a carbon nanotube with conductor property and a carbon nanotube with semiconductor property over the source electrode, the drain electrode and a region of the gate insulating film between the source electrode and the drain electrode and overlapped with the gate electrode;

applying an alternating current voltage between the source electrode and the drain electrode in order to control an alignment direction of the carbon nanotube;

evaporating the solvent for forming a carbon nanotube layer connecting the source electrode and the drain electrode; and

applying a direct current voltage between the source electrode and the drain electrode in order to remove the carbon nanotube with conductor property.

7. A method of manufacturing a carbon nanotube semiconductor device according to claim 6,further comprising:

forming an alignment film so as to cover the source electrode, the drain electrode, and the gate insulating film between the source electrode and the drain electrode; and

rubbing a surface of the alignment film.

8. A method of manufacturing a carbon nanotube semiconductor device according to claim 6, wherein a frequency of the alternating current voltage is equal to or larger than 1 MHz.

9. A method of manufacturing a carbon nanotube semiconductor device according to claim 6, wherein a concentration of the carbon nanotube contained in the carbon nanotube solution is equal to or lower than 0.0005%.

10. A method of manufacturing a carbon nanotube semiconductor device, comprising:

providing a first electrode and a second electrode over substrate;

applying a solution containing carbon nanotube nanotubes with conductor property and carbon nanotubes with semiconductor property over the first and second electrodes and a region of a surface of the substrate between the first and second electrodes;

controlling the carbon nanotubes in a predetermined alignment direction; and

applying a direct current voltage between the first and second electrodes, thereby removing the carbon nanotubes with conductor property,

wherein a third electrode is located adjacent to and overlapped with the carbon nanotubes with semiconductor property connecting the first and second electrodes with an insulating film therebetween.