Light emitting device and a method of manufacturing the same

• US 7,098,602 B2
• Filed: 05/27/2004
• Issued: 08/29/2006
• Est. Priority Date: 03/27/2000
• Status: Expired due to Fees

• Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Original Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Inventors: Fukunaga, Takeshi, Hiroki, Masaaki, Yamazaki, Shunpei
• Primary Examiner(s): Philogene, Haissa
• Application Number:
  US10/854,731
• Publication Number:
  US 20040219859A1
• Time in Patent Office: 824 Days
• Field of Search: 315/169.1, 315/169.3, 315/167, 257/57, 257/61, 257/257, 257/296, 257/392, 257/448, 257/347, 257/517, 345/45, 345/48, 345/76, 345/84, 345/92, 313/495, 313/504, 349/42, 349/43, 349/48, 349/69, 438/758, 438/762, 438/780, 438/782
• US Class Current: 315/169.3
• CPC Class Codes: G09G 3/3208 organic, e.g. using organic light-emitting diodes [OLED]
• CPC Class Codes: H01L 27/1214 comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
• CPC Class Codes: H01L 27/127 with a particular formation, treatment or patterning of the active layer specially adapted to the circuit arrangement
• CPC Class Codes: H01L 29/78621 with LDD structure or an extension or an offset region or characterised by the doping profile
• CPC Class Codes: H01L 29/78627 with a significant overlap between the lightly doped drain and the gate electrode, e.g. GOLDD
• CPC Class Codes: H10K 59/122 Pixel-defining structures or layers, e.g. banks
• CPC Class Codes: H10K 59/131 Interconnections, e.g. wiring lines or terminals
• CPC Class Codes: H10K 71/00 Manufacture or treatment specially adapted for the organic devices covered by this subclass
• CPC Class Codes: H10K 71/10 Deposition of organic active material
• CPC Class Codes: H10K 71/164 using vacuum deposition
• CPC Class Codes: H10K 71/166 using selective deposition, e.g. using a mask
• CPC Class Codes: H10K 71/40 Thermal treatment, e.g. annealing in the presence of a solvent vapour
• CPC Class Codes: H10K 71/50 Forming devices by joining two substrates together, e.g. lamination techniques

Abstract

To provide a light emitting device having a highly definite pixel portion. An anode (102) and a bank (104) orthogonal to the anode (102) are formed on an insulator (101). A portion of the bank (104) (controlling bank 104b) is made of a metal film. By applying a voltage thereto, an electric field is formed, and a track of an EL material that is charged with an electric charge can be controlled. Thus, it becomes possible to control a film deposition position of an EL layer with precision by utilizing the above method.

Claims

1. A method of manufacturing a display device comprising:

providing a substrate to be processed;

scattering a material charged with a polarity by an evaporation method; and

applying the material on a surface over the substrate.

2. A method of manufacturing a display device according to claim 1, wherein the material comprises an EL material.

3. A method of manufacturing a display device according to claim 1, wherein the material is charged with a negative charge.

4. A method of manufacturing a display device according to claim 1, wherein the surface comprises an anode.

5. A method of manufacturing a display device according to claim 1, wherein the display device is an EL display device.

6. A method of manufacturing a display device according to claim 1, wherein the display device is incorporated in at least one selected from the group consisting of a video camera, a digital camera, an image playback device, a mobile computer, a personal computer, a portable telephone, and a car audio stereo.

7. A method of manufacturing a display device comprising:

providing a substrate to be processed;

scattering a material charged with a polarity by an evaporation method; and

applying the material on a surface over the substrate, wherein the surface is charged with an opposite polarity to the polarity.

8. A method of manufacturing a display device according to claim 7, wherein the material comprises an EL material.

9. A method of manufacturing a display device according to claim 7, wherein the material is charged with a negative charge.

10. A method of manufacturing a display device according to claim 7, wherein the surface comprises an anode.

11. A method of manufacturing a display device according to claim 7, wherein the display device is an EL display device.

12. A method of manufacturing a display device according to claim 7, wherein the display device is incorporated in at least one selected from the group consisting of a video camera, a digital camera, an image playback device, a mobile computer, a personal computer, a portable telephone, and a car audio stereo.

13. A method of manufacturing a display device comprising:

providing a substrate to be processed;

scattering a material charged with a polarity by an evaporation method; and

applying the material on a surface over the substrate,

wherein the surface comprises a bank charged with a same polarity as the polarity.

14. A method of manufacturing a display device according to claim 13, wherein the material comprises an EL material.

15. A method of manufacturing a display device according to claim 13, wherein the material is charged with a negative charge.

16. A method of manufacturing a display device according to claim 13, wherein the surface comprises an anode.

17. A method of manufacturing a display device according to claim 13, wherein the display device is an EL display device.

18. A method of manufacturing a display device according to claim 13, wherein the display device is incorporated in at least one selected from the group consisting of a video camera, a digital camera, an image playback device, a mobile computer, a personal computer, a portable telephone, and a car audio stereo.

19. A method of manufacturing a display device comprising:

providing a substrate to be processed;

scattering a material by an evaporation method;

charging the material with a polarity by an electrode; and

applying the material charged with the polarity on a surface over the substrate.

20. A method of manufacturing a display device according to claim 19, wherein the material comprises an EL material.

21. A method of manufacturing a display device according to claim 19, wherein the material is charged with a negative charge.

22. A method of manufacturing a display device according to claim 19, wherein the surface comprises an anode.

23. A method of manufacturing a display device according to claim 19, wherein the electrode comprises a ring-like electrode.

24. A method of manufacturing a display device according to claim 19, wherein the display device is an EL display device.

25. A method of manufacturing a display device according to claim 19, wherein the display device is incorporated in at least one selected from the group consisting of a video camera, a digital camera, an image playback device, a mobile computer, a personal computer, a portable telephone, and a car audio stereo.

26. A method of manufacturing a display device comprising:

providing a substrate to be processed;

scattering a material by an evaporation method;

charging the material with a polarity by an electrode; and

applying the material charged with the polarity on a surface over the substrate,

wherein the surface is charged with an opposite polarity to the polarity.

27. A method of manufacturing a display device according to claim 26, wherein the material comprises an EL material.

28. A method of manufacturing a display device according to claim 26, wherein the material is charged with a negative charge.

29. A method of manufacturing a display device according to claim 26, wherein the surface comprises an anode.

30. A method of manufacturing a display device according to claim 26, wherein the electrode comprises a ring-like electrode.

31. A method of manufacturing a display device according to claim 26, wherein the display device is an EL display device.

32. A method of manufacturing a display device according to claim 26, wherein the display device is incorporated in at least one selected from the group consisting of a video camera, a digital camera, an image playback device, a mobile computer, a personal computer, a portable telephone, and a car audio stereo.

33. A method of manufacturing a display device comprising:

providing a substrate to be processed;

scattering a material by an evaporation method;

charging the material with a polarity by an electrode; and

applying the material charged with the polarity on a surface over the substrate,

wherein the surface comprises a bank charged with a same polarity as the polarity.

34. A method of manufacturing a display device according to claim 33, wherein the material comprises an EL material.

35. A method of manufacturing a display device according to claim 33, wherein the material is charged with a negative charge.

36. A method of manufacturing a display device according to claim 33, wherein the surface comprises an anode.

37. A method of manufacturing a display device according to claim 33, wherein the electrode comprises a ring-like electrode.

38. A method of manufacturing a display device according to claim 33, wherein the display device is an EL display device.

39. A method of manufacturing a display device according to claim 33, wherein the display device is incorporated in at least one selected from the group consisting of a video camera, a digital camera, an image playback device, a mobile computer, a personal computer, a portable telephone, and a car audio stereo.