Non-contact high-voltage electrometer architecture with low-voltage feedback

• US 7,098,644 B1
• Filed: 03/22/2005
• Issued: 08/29/2006
• Est. Priority Date: 03/22/2004
• Status: Active Grant

• Current Assignee: Analog Devices, Inc.
• Original Assignee: Analog Devices, Inc.
• Inventors: Denison, Timothy J.
• Primary Examiner(s): Deb, Anjan
• Assistant Examiner(s): NATALINI, JEFF WILLIAM
• Application Number:
  US11/086,976
• Time in Patent Office: 525 Days
• Field of Search: 324/72, 324/72.5, 324/457, 324/99.D, 324/458, 324/658
• US Class Current: 324/72.5
• CPC Class Codes: G01R 29/12 Measuring electrostatic fields or voltage-potential

Abstract

A voltmeter measures an unknown voltage on a target surface using multiple sampling stages or a parallel reference capacitor. A movable shutter may alternately be closed during resetting of a voltage measuring circuit and opened so as to expose a detector plate to the target surface during two sampling stages. Alternatively, the shutter may be used to modulate exposure of a detector plate to the target surface.

Claims

1. A voltmeter for measuring an unknown voltage Vs on a target surface without contacting the target surface, the voltmeter comprising:

a voltage measuring circuit having a detector plate forming a capacitance Cm with the target surface; and

a movable shutter for selectively exposing the detector plate to the target surface, wherein the voltage measuring circuit (1) measures, in a first sampling stage, a charge Vs*B, where B is proportional to Cm;

(2) measures, in a second sampling stage, a charge Vp*B, where Vp is a known voltage introduced by the voltage measuring circuit;

(3) determines the value B based on the known voltage Vp; and

(4) determines the value Vs based on the determined value B, and wherein the shutter is placed in a closed position substantially blocking the detector plate from the target surface for resetting the voltage measuring circuit prior to measuring the charge Vs*B and the shutter is moved into an opened position exposing the detector plate to the target surface for measuring the charges Vs*B and Vp*B.

2. A voltmeter according to claim 1, wherein the voltage measuring circuit further comprises:

a voltage source having a voltage Vp;

a charge amplifier having a first input coupled to the detector plate, a second input that can be selectively coupled to one of ground and the voltage source, and an output;

a reference capacitor having a capacitance Cf coupled between the first input of the charge amplifier and the output of the charge amplifier;

a difference amplifier having a first input coupled to the output of the charge amplifier, a second input coupled to the voltage source, and an output; and

a controller coupled to the output of the charge amplifier, the output of the difference amplifier, and the shutter, wherein;

in the first sampling stage, with the shutter in the closed position, the voltage measuring circuit reset, and the second charge amplifier input switched to ground, the controller causes the shutter to be moved into the opened position and measures the output Vo of the charge amplifier, which is equal Vs*Cm/Cf; and

in the second sampling stage, with the shutter still in the opened position, the reference capacitor reset, and the second charge amplifier input switched to the voltage source, the controller measures the output Vy of the difference amplifier, which is equal to Vp*Cm/Cf; and

the controller determines the quantity Cm/Cf based on Vy and the known quantity Vp and determines the value of Vs based on Vo and the determined quantity Cm/Cf.

3. A voltmeter according to claim 2, wherein the controller includes a sample and hold circuit for measuring and storing Vo.

4. A voltmeter according to claim 2, wherein the voltage source produces a DC voltage.

5. A voltmeter according to claim 2, wherein the voltage source produces an AC voltage, and wherein the controller includes a demodulator to demodulate the varying signal output by the difference amplifier during the second sampling stage.

6. A voltmeter according to claim 2, wherein the voltage measuring circuit further comprises:

a reset switch coupled in parallel with the reference capacitor.

7. A voltmeter according to claim 6, wherein the controller resets the reference capacitor using the reset switch before exposing the detector plate to the target surface.

8. A voltmeter according to claim 6, wherein the controller resets the reference capacitor using the reset switch between the first and second sampling stages.

9. A voltmeter according to claim 1, wherein the shutter and the detector plate are formed on a common substrate.

10. A method for measuring an unknown voltage Vs on a target surface, the method comprising:

resetting a voltage measuring circuit with a shutter in a closed position so as to substantially block a detector plate of the voltage measuring circuit from exposure to the target surface;

a moving the shutter into an opened position so as to expose the detector plate with a capacitance of Cm to the target surface;

measuring a charge Vs*B using the detector plate, where B is proportional to Cm;

measuring a charge Vp*B with the shutter still in the opened position, where Vp is a known voltage;

determining the value of B based on the known voltage Vp; and

determining the value of Vs based on the determined value B.

11. A method according to claim 10, wherein measuring a charge Vs*B using the detector plate comprises measuring the induced charge on the detector plate relative to a reference capacitor with capacitance Cf and ground to obtain a voltage Vo equal to Vs*Cm/Cf, and wherein measuring a charge Vp*B comprises measuring the charge on the detector plate relative to the reference capacitor and a known voltage Vp to obtain a voltage Vy equal to Vp*Cm/Cf.

12. A method according to claim 11, wherein measuring the charge on the detector plate to obtain the voltage Vy comprises:

measuring the charge on the detector plate relative to the reference capacitor and the known voltage Vp to obtain an intermediate voltage Vx equal to Vp+Vp*Cm/Cf; and

subtracting the known voltage Vp from the voltage Vx to obtain Vy.

13. A method according to claim 11, further comprising:

resetting the reference capacitor before exposing the detector plate to the target surface.

14. A method according to claim 11, further comprising:

resetting the reference capacitor between (1) measuring the induced charge on the detector plate relative to a reference capacitor Cf and ground and (2) measuring the charge on the detector plate relative to the reference capacitor and a known voltage Vp.

15. A method according to claim 10, wherein exposing the detector plate to the target surface comprises:

retracting a shutter from between the detector plate and the target surface.

16. A method according to claim 15, wherein the shutter and the detector plate are formed on a common substrate.

17. A voltmeter for measuring an unknown voltage Vs on a target surface without contacting the target surface, the voltmeter comprising:

a voltage measuring circuit having a first detector plate forming a capacitance Cm with the target surface and a second detector plate forming a capacitance N*Cm with the target surface, where N is a known constant representing that the second detector plate is N times the size of the first detector plate; and

a movable shutter for modulating exposure of the first detector plate to the target surface, wherein the voltage measuring circuit comprises;

a nominal modulation capacitance circuit for measuring a first charge proportional to Vs*dCm/dt using the first detector plate;

a parallel capacitance circuit for measuring a second charge proportional to N*Cm*dVp/dt using the second detector plate, where Vp is a known voltage modulated in phase and frequency with the modulated exposure of the first detector plate;

a comparison circuit for comparing the first and second charges; and

a controller for adjusting the magnitude of Vp based on the comparison circuit until the first and second charges are equal and determining Vs based on the voltage Vp.

18. A voltmeter according to claim 17, wherein:

the nominal modulation capacitance circuit further includes a first reference resistor having a resistance value R and a first charge amplifier, the first detector plate coupled to one input of the first charge amplifier, the first reference resistor coupled in parallel to the charge amplifier between said one input of the first charge amplifier and an output of the first charge amplifier, and another input of the first charge amplifier tied to ground;

the parallel reference capacitance circuit further includes a second reference resistor also having a resistance value R, a second charge amplifier, a voltage source (Vp), and a first difference amplifier, the second detector plate coupled to one input of the second charge amplifier, the second reference resistor coupled in parallel to the second charge amplifier between said one input of the second charge-amplifier and output of the second charge amplifier, another input of the second charge amplifier tied to the voltage source, and the first difference amplifier coupled to receive as inputs the output of the second charge amplifier and the voltage source; and

the comparison circuit includes a second difference amplifier having a first input coupled to the output of the first charge amplifier and a second input coupled to the output of the first difference amplifier, wherein;

the controller causes the shutter to be modulated at a predetermined frequency such that the output of the first charge amplifier is equal to R*Vs*dCm/dt;

the controller causes the voltage source to output a predetermined voltage Vp in phase and frequency with the modulation of the shutter such that the output of the first difference amplifier is equal to R*N*Cm*dVp/dt and the output of the second difference amplifier is equal to the difference between the values R*Vs*dCm/dt and R*N*Cm*dVp/dt;

the controller adjusts the magnitude of the voltage source until the output of the second difference amplifier is null; and

the controller determines Vs based on the known quantities Vp and N, where Vs is equal to Vp*N.

19. A voltmeter according to claim 17, wherein the shutter and the detector plates are formed on a common substrate.