Acoustically coupled thin-film resonators having an electrode with a tapered edge
First Claim
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1. Acoustically coupled resonators comprising:
- a first acoustic resonator comprising;
a layer of piezoelectric material having first and second surfaces;
a first electrode of the first acoustic resonator adjacent the first surface of the layer of piezoelectric material;
a second electrode of the first acoustic resonator adjacent the second surface of the layer of piezoelectric material; and
a second acoustic resonator comprising;
a first electrode of the second acoustic resonator adjacent the first surface of the layer of piezoelectric material; and
a second electrode of the second acoustic resonator adjacent the second surface of the layer of piezoelectric material;
wherein the first and second acoustic resonators are acoustically coupled, wherein the second electrode of the first acoustic resonator is separated from the second electrode of the second acoustic resonator, and wherein the second electrode of the first acoustic resonator has an edge that is tapered.
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Abstract
Acoustically coupled resonators include a first and a second acoustic resonator. Both the first and second acoustic resonators include a first electrode, a layer of piezoelectric material, and a second electrode. The first electrode is adjacent a first surface of the layer of piezoelectric material. The second electrode is adjacent a second surface of the layer of piezoelectric material. At least the second electrode has an edge that is tapered.
122 Citations
23 Claims
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1. Acoustically coupled resonators comprising:
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a first acoustic resonator comprising; a layer of piezoelectric material having first and second surfaces; a first electrode of the first acoustic resonator adjacent the first surface of the layer of piezoelectric material; a second electrode of the first acoustic resonator adjacent the second surface of the layer of piezoelectric material; and a second acoustic resonator comprising; a first electrode of the second acoustic resonator adjacent the first surface of the layer of piezoelectric material; and a second electrode of the second acoustic resonator adjacent the second surface of the layer of piezoelectric material; wherein the first and second acoustic resonators are acoustically coupled, wherein the second electrode of the first acoustic resonator is separated from the second electrode of the second acoustic resonator, and wherein the second electrode of the first acoustic resonator has an edge that is tapered. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. First and second acoustically coupled resonators comprising:
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a substrate; a first electrode of the first acoustic resonator adjacent the substrate; a first electrode of the second acoustic resonator adjacent the substrate; a layer of piezoelectric material adjacent the first electrodes of the first and second acoustic resonators wherein the layer of piezoelectric material is a single layer that is shared by the first and second acoustic resonators; a second electrode of the first acoustic resonator adjacent the layer of piezoelectric material; and a second electrode of the second acoustic resonator adjacent the layer of piezoelectric material; wherein the second electrode of the first acoustic resonator is separated from the second electrode of the second acoustic resonator, and wherein the second electrode of the first acoustic resonator has an edge that is tapered. - View Dependent Claims (12, 13, 14)
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15. A filter circuit comprising:
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a first acoustically-coupled-resonator pair comprising; a first resonator having a layer of piezoelectric material sandwiched between first and second electrodes; and a second resonator having a layer of piezoelectric material sandwiched between first and second electrodes; wherein the second electrodes of the first and second resonators are separated by a gap and are tapered adjacent the gap; and a second acoustically-coupled-resonator pair comprising; a third resonator having a layer of piezoelectric material sandwiched between first and second electrodes; and a fourth resonator having a layer of piezoelectric material sandwiched between first and second electrodes; wherein the second electrodes of the third and fourth resonators are separated by a gap and are tapered adjacent the gap. - View Dependent Claims (16, 17, 18, 19, 20, 21, 22, 23)
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Specification