MEMS device for an adaptive optics mirror
First Claim
1. A MEMS device, comprising:
- a rotatable mass suspended at a first offset distance from a substrate, wherein the rotatable mass is a part of a motion actuator adapted to move said mass with respect to the substrate; and
an upright spring coupled between the rotatable mass and the substrate, wherein the upright spring and the motion actuator enable rotation of said mass about a rotation axis offset from the substrate by a distance greater than the first offset distance.
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Accused Products
Abstract
A MEMS device having a movable mirror pixel supported on a substrate and coupled to a motion actuator so as to enable rotation of the mirror pixel about an axis lying within the mirror plane. In one embodiment, the motion actuator has a movable electrode, on which the mirror pixel is mounted. The movable electrode is supported on the substrate by a pair of upright springs, each having two parallel segments joined at one end and disjoint at the other end. One disjoint segment end is coupled to the substrate, while the other disjoint segment end is coupled to the movable electrode. The end of the upright spring corresponding to the joined segment ends points away from the substrate such that (i) the spring body protrudes through a narrow slot in the mirror pixel and (ii) the mirror plane lies at about the mid-point of the spring.
46 Citations
24 Claims
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1. A MEMS device, comprising:
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a rotatable mass suspended at a first offset distance from a substrate, wherein the rotatable mass is a part of a motion actuator adapted to move said mass with respect to the substrate; and an upright spring coupled between the rotatable mass and the substrate, wherein the upright spring and the motion actuator enable rotation of said mass about a rotation axis offset from the substrate by a distance greater than the first offset distance. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
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19. A MEMS device, comprising an upright spring supported on a substrate and a rotatable mass suspended at a first offset distance from a substrate, wherein:
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the upright spring comprises two segments joined at one end of the spring and disjoint at another end of the spring; one disjoint segment end is coupled to the substrate and the other disjoint segment end is adapted to move with respect to the substrate; the end of the spring having the joined segments is an unattached end; the disjoint segment end adapted to move with respect to the substrate is connected to the rotatable mass; and the upright spring enables rotation of the rotatable mass about a rotation axis offset from the substrate by a distance greater than the first offset distance. - View Dependent Claims (20, 21, 22)
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23. A MEMS device, comprising:
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a rotatable mass suspended at a first offset distance from a substrate, wherein the rotatable mass comprises an outer sub-structure and an inner sub-structure, wherein the inner sub-structure is adapted to move with respect to the outer sub-structure and the outer sub-structure is adapted to move with respect to the substrate; and an upright spring coupled between the rotatable mass and the substrate, wherein the upright spring enables rotation of said mass about a rotation axis offset from the substrate by a distance greater than the first offset distance. - View Dependent Claims (24)
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Specification