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X-ray inspection apparatus and X-ray inspection method

  • US 7,099,432 B2
  • Filed: 08/23/2004
  • Issued: 08/29/2006
  • Est. Priority Date: 08/27/2003
  • Status: Expired due to Fees
First Claim
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1. An X-ray inspection device comprising:

  • an X-ray irradiation device for generating an X-ray and irradiating an object to be inspected with the X-ray;

    an X-ray detection device for detecting the X-ray radiated from said X-ray irradiation device that passes through said object to be inspected;

    a swinging device having a holding plane for holding said object to be inspected in an X-ray path from said X-ray irradiation device to said X-ray detection device and driving said holding plane at an optional angle in an optional direction with respect to an X-ray irradiation axis which is arranged on said X-ray path; and

    a control device for controlling driving of said swinging device and said X-ray irradiation device, receiving an input of an X-ray image data from said X-ray detection device and displaying said X-ray image data,wherein said holding plane is composed to swing said holding plane by rotating around two axes orthogonal to each other by an X-axis motor and a Y-axis motor, rotation by said X-axis motor is reciprocating motion reciprocating within a predetermined range of rotation angles and rotation by said Y-axis motor performs reciprocating motion of the same cycle within a predetermined range of rotation angles with the phase being shifted from the rotation of said X-axis motor.

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