Apparatus and method having mechanical isolation arrangement for controlling the temperature of an electronic device under test

• US 7,100,389 B1
• Filed: 07/16/2002
• Issued: 09/05/2006
• Est. Priority Date: 07/16/2002
• Status: Expired due to Fees

• Current Assignee: Advantest Corporation, Delta Design Incorporated (COHU Incorporated)
• Original Assignee: Delta Design Incorporated (COHU Incorporated)
• Inventors: Schmidt, Charles R. Jr., Spearing, Ian G., Wayburn, Lewis S.
• Primary Examiner(s): Doerrler, William
• Assistant Examiner(s): EARLY, MICHAEL JACOBY
• Application Number:
  US10/196,354
• Time in Patent Office: 1,512 Days
• Field of Search: 622/592, 622/95, 622/23, 324/750, 324/760, 324/765, 165/80.4, 165/80.7, 165/81, 165/82, 165/83, 165/104.33, 361699-703
• US Class Current: 62/259.2
• CPC Class Codes: F25B 41/37 Capillary tubes
• CPC Class Codes: F25D 19/006 Thermal coupling structure or interface
• CPC Class Codes: G01R 31/2874 related to temperature

Abstract

An apparatus and method for controlling the temperature of an electronic device under test utilizes a thermal head spaced apart from a movable support structure by a mechanical isolation assembly. The support structure has a manifold configured to route refrigerant fluid between the evaporator head and components of a refrigeration system. The mechanical isolation assembly is configured to compensate for variations in the planar orientation of the device under test. Moreover, the mechanical isolation assembly preferably includes bellows through which the refrigerant fluid is conducted.

Claims

1. An apparatus for controlling the temperature of an electronic device under test, said apparatus comprising:

a refrigeration system including a compressor and a condenser, said refrigeration system being operative to circulate a refrigerant fluid will change between gaseous and liquid states to alternately absorb and release thermal energy;

an evaporator head connected into said fluid flow loop, said evaporator head having a temperature controlled surface;

a support structure in spaced apart relation to said evaporator head, said support structure having a manifold configured to route said refrigerant fluid between said evaporator head and components of said refrigeration system;

a mechanical isolation assembly situated between said evaporator head and said support structure so as to compensate for variations in the planar orientation of said device under test; and

said mechanical isolation assembly including an inflow bellows and an outflow bellows located side by side to one another, inflow bellows providing inflow of said refrigerant fluid from said evaporator head to said support structure.

2. An apparatus as set forth in claim 1, wherein said mechanical isolation assembly further comprises an outer bellows in which said inflow and outflow bellows are located.

3. An apparatus as set forth in claim 1, further comprising a third bellows substantially equidistant from said inflow bellows and said outflow bellows.

4. An apparatus as set forth in claim 3, wherein said mechanical isolation assembly further comprises an outer bellows in which said inflow and outflow bellows are located.

5. An apparatus as set forth in claim 1, wherein said support structure is movable between a retracted position farther from said device under test and an extended position closer to said device under test.

6. An apparatus as set forth in claim 5, wherein said support structure includes a substrate engaging member, said substrate engaging member configured to engage a substrate to which said device under test is mounted when said support structure is in said extended position so as to facilitate electrical contact between said device under test and a test fixture.

7. An apparatus as set forth in claim 1, wherein said mechanical isolation assembly further includes a controllable mechanism operative to selectively vary an engagement force between said evaporator head and said device under test.

8. An apparatus as set forth in claim 7, wherein said controllable mechanism is actuated via a source of pressurized gas.

9. An apparatus as set forth in claim 1, wherein said mechanical isolation assembly includes a pivotal separation element extending between said thermal head and said support structure.

10. An apparatus for controlling the temperature of an electronic device under test, said apparatus comprising:

a refrigeration system including a compressor and a condenser, said refrigeration system being operative to circulate a refrigerant fluid through a fluid flow loop such that said refrigerant fluid will change between gaseous and liquid states to alternately absorb and release thermal energy;

an evaporator head connected into said fluid flow loop, said evaporator head having a temperature controlled surface;

a support structure in spaced apart relation to said evaporator head, said support structure being movable between a retracted position farther from said device under test and an extended position closer to said device under test;

a source of pressurized gas;

a mechanical isolation assembly including a controllable bellows situated between said support structure and said evaporator head, said controllable bellows being in fluid communication with said source of pressurized gas so as to selectively vary an engagement force between said evaporator head and said device under test.

11. An apparatus as set forth in claim 10, wherein said mechanical isolation assembly further includes an outflow bellows providing outflow of said refrigerant fluid from said evaporator head to said support structure.

12. An apparatus as set forth in claim 11, wherein said mechanical isolation assembly further includes an inflow bellows providing inflow of said refrigerant fluid into said evaporator head from said support structure.

13. An apparatus as set forth in claim 12, wherein said controllable bellows, said inflow bellows and said outflow bellows are substantially equidistant from one another.

14. An apparatus as set forth in claim 12, wherein said mechanical isolation assembly further comprises a capillary tube coiled between said support structure and said evaporator head, said capillary tube providing inflow of said refrigerant fluid into said evaporator head from said support structure.

15. An apparatus as set forth in claim 10, wherein further comprising an extension limiting mechanism to inhibit over-extension of said mechanical isolation assembly.

16. An apparatus as set forth in claim 15, wherein said extension limiting mechanism comprises first and second interlocking elements.

17. An apparatus comprising:

a thermal head defining a passage for flow of refrigerant fluid therethrough, said thermal head having a temperature controlled surface for engagement with an electronic device;

a support structure in spaced apart relation to said thermal head, said support structure having a manifold configured to route said refrigerant fluid;

a mechanical isolation assembly situated between said thermal head and said support structure so as to compensate for variations in the planar orientation of said electronic device;

said mechanical isolation assembly including an inflow bellows and an outflow bellows, said inflow bellows providing inflow of said refrigerant fluid into said thermal head from said support structure and said outflow bellows providing outflow of said refrigerant fluid from said thermal head to said support structure; and

said mechanical isolation assembly further including a controllable mechanism operative to selectively vary an engagement force between said thermal head and said electronic device.

18. An apparatus as set forth in claim 17, wherein said controllable mechanism is actuated via a source of pressurized gas.

19. An apparatus as set forth in claim 18, wherein said controllable mechanism comprises a controllable bellows.

20. An apparatus as set forth in claim 19, wherein said inflow bellows and said outflow bellows are coaxial to one another.

21. An apparatus as set forth in claim 20, wherein said inflow bellows and said outflow bellows are located inside of said controllable bellows.

22. An apparatus as set forth in claim 21, further comprising an outer bellows in which said inflow bellows, said outflow bellows and said controllable bellows are located.

23. An apparatus as set forth in claim 19, wherein said inflow and outflow bellows are located side by side to one another.

24. An apparatus as set forth in claim 23, wherein said controllable bellows is located substantially equidistant from said inflow bellows and said outflow bellows.

25. An apparatus as set forth in claim 17, wherein said support structure is movable between a retracted position farther from said device under test and an extended position closer to said device under test.

26. An apparatus as set forth in claim 25, wherein said support structure includes a substrate engaging member, said substrate engaging member configured to engage a substrate to which said electronic device is mounted when said support structure is in said extended position so as to facilitate electrical contact between said electronic device and a text fixture.

27. An apparatus as set forth in claim 17, wherein further comprising an extension limiting mechanism to inhibit over-extension of said mechanism isolation assembly.

28. An apparatus as set forth in claim 27, wherein said extension limiting mechanism comprises first and second interlocking elements.

29. An apparatus as set forth in claim 17, wherein said thermal head further includes a heater operative to supply thermal energy to said temperature controlled surface when necessary to maintain said predetermined temperature.

30. A method of engaging an electronic device to be tested with a thermal head at a selected force, said method comprising steps of:

(a) providing an arrangement wherein said thermal head is separated from a support structure by an intervening mechanical isolation assembly, said mechanical isolation assembly having a controllable bellows;

(b) moving said support structure from a retracted position farther from said electronic device to an extended position closer to said electronic device; and

(c) introducing pressurized gas into said controllable bellows so as to cause said thermal head to engage said electronic device with said selected force.

31. An apparatus for controlling the temperature of an electronic device under test, said apparatus comprising:

a thermal head defining a passage for flow of refrigerant fluid therethough, said thermal head having a temperature controlled surface for engagement with an electronic device;

a support structure in spaced apart relation to said thermal head, said support structure having a manifold configured to route said refrigerant fluid;

a mechanical isolation assembly including an inflow bellows and an outflow bellows, said inflow bellows providing inflow of said refrigerant fluid into said thermal head from said support structure and said outflow bellows providing outflow of said refrigerant fluid from said thermal head to said support structure; and

said mechanical isolation assembly including a separation element extending between said thermal head and said support structure, said separation element being pivotal so as to allow variations in a planar orientation of said temperature controlled surface.

32. An apparatus as set forth in claim 31, wherein said separation element comprises a post having a first end fixed to said thermal head, said post further having a second end pivotally engaging said support structure.

33. An apparatus as set forth in claim 32, wherein said second end of said post includes a dome portion.

34. An apparatus as set forth in claim 33, wherein said dome portion slidably engages a spherical surface of said support structure.

35. An apparatus as set forth in claim 34, wherein said dome portion and said spherical surface are coated with a low friction material.

36. An apparatus as set forth in claim 32, wherein said post is hollow.

37. An apparatus as set forth in claim 31, wherein said support structure is movable between a retracted position farther from said device under test and an extended position closer to said device under test.

38. An apparatus as set forth in claim 31, further including a refrigeration system including a compressor and a condenser, said refrigeration system being operative to circulate a refrigerant fluid through a fluid flow loop such that said refrigerant fluid will change between gaseous and liquid states to alternately absorb and release thermal energy.