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Method for adjusting the frequency of a MEMS resonator

  • US 7,102,467 B2
  • Filed: 04/28/2004
  • Issued: 09/05/2006
  • Est. Priority Date: 04/28/2004
  • Status: Active Grant
First Claim
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1. A method of adjusting the resonant frequency of a MEMS resonator, wherein the MEMS resonator comprises a first substrate anchor including a first electrical contact, a second substrate anchor including a second electrical contact, and a beam structure fixed at a first end by the first substrate anchor and at a second end by the second substrate anchor, and wherein the MEMS resonator includes a first resonant frequency, the method comprising:

  • measuring the first resonant frequency of the MEMS resonator;

    selecting a first heating current to apply to the first electrical contact, and wherein the first heating current is selected based on the measured first resonant frequency; and

    applying the first heating current to the MEMS resonator wherein applying the first heating current includes passing the first heating current from the first electrical contact to the second electrical contact to resistively heat the beam structure, wherein, in response, the material of the beam structure changes to provide a second resonant frequency of the MEMS resonator.

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