Inspection system and apparatus
First Claim
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1. A method of inspecting a sample'"'"'s surface with an inspection system, comprising the steps of:
- providing a sample having a surface;
providing a non-vibrating contact potential probe;
scanning the sample'"'"'s surface with the non-vibrating contact potential probe by causing relative motion between the non-vibrating contact potential probe and the sample'"'"'s surface;
measuring contact potential difference between the sample'"'"'s surface and the non-contact potential probe;
generating a first signal portion characteristic of a topographical feature of the sample'"'"'s surface and further having a second signal portion representing chemical features of the sample'"'"'s surface.
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Abstract
A method and system for identifying a defect or contamination on a surface of a material. The method and system involves providing a material, such as a semiconductor wafer, using a non-vibrating contact potential difference sensor to scan the wafer, generate contact potential difference data and processing that data to identify a pattern characteristic of the defect or contamination.
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Citations
24 Claims
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1. A method of inspecting a sample'"'"'s surface with an inspection system, comprising the steps of:
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providing a sample having a surface; providing a non-vibrating contact potential probe; scanning the sample'"'"'s surface with the non-vibrating contact potential probe by causing relative motion between the non-vibrating contact potential probe and the sample'"'"'s surface; measuring contact potential difference between the sample'"'"'s surface and the non-contact potential probe; generating a first signal portion characteristic of a topographical feature of the sample'"'"'s surface and further having a second signal portion representing chemical features of the sample'"'"'s surface. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19)
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20. A system for identifying features on the surface of a sample comprising:
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a non-vibrating contact potential difference sensor; a mechanism for causing relative motion between the sample and the non-vibrating contact potential difference sensor; a mechanism for measuring contact potential difference between the sample and the non-vibrating contact potential probe; a generated signal representing the contact potential difference; and a generated bias voltage applied to a portion of the system chosen from the group consisting of the sample, the non-vibrating contact potential probe, and combinations thereof. - View Dependent Claims (21, 22, 23)
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24. A system for inspecting the surface of a sample comprising:
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a non-vibrating contact potential difference sensor; a chuck for rotating the sample about a central axis; the chuck having a variable speed control mechanism for changing rotational velocity in proportion with the motion of the probe to provide the probe with substantially even data density; and a source of data representing a contact potential difference between the non-vibrating contact potential difference sensor and the surface of the sample.
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Specification