Fluid sampling apparatus and fluid analyzer having the same

• US 7,105,133 B2
• Filed: 09/24/2002
• Issued: 09/12/2006
• Est. Priority Date: 09/28/2001
• Status: Expired due to Fees

• Current Assignee: Samsung Electronics Co. Ltd.
• Original Assignee: Samsung Electronics Co. Ltd.
• Inventors: Choi, Won-Suk, Kim, Jin-Suk, Sung, Woo-Dong, Kim, Dong-Hyun, Cho, Do-Hyun
• Primary Examiner(s): Gordon, Brian R.
• Application Number:
  US10/253,023
• Publication Number:
  US 20030064007A1
• Time in Patent Office: 1,449 Days
• Field of Search: 422/65, 422/100, 422/63, 422/67, 422/68.1, 422/93, 422/103, 422/64
• US Class Current: 422/509
• CPC Class Codes: G01N 1/16 with provision for intake at several levels G01N1/2035 G01N1/12, G01N1/14 take precedence
• CPC Class Codes: G01N 1/18 with provision for splitting samples into portions G01N1/12, G01N1/14 take precedence; fraction-collection apparatus for chromatography B01D15/08
• CPC Class Codes: G01N 35/10 Devices for transferring samples or any liquids to, in, or from, the analysis apparatus, e.g. suction devices, injection devices G01N35/0099 takes precedence
• CPC Class Codes: Y10T 436/11 Automated chemical analysis
• CPC Class Codes: Y10T 436/111666 Utilizing a centrifuge or compartmented rotor
• CPC Class Codes: Y10T 436/119163 with aspirator of claimed structure
• CPC Class Codes: Y10T 436/2575 Volumetric liquid transfer

Abstract

A fluid sampling apparatus and associated fluid analyzer sample process fluids used in semiconductor manufacturing at a plurality of measurement points. The fluid sampling apparatus includes a first nozzle assembly having a plurality of outlet nozzles. The plurality of outlet nozzles are connected to lines supplying the process fluids. A second nozzle assembly is installed above the first nozzle assembly and includes an inlet nozzle connected to an apparatus for measuring a contamination level of the process fluids. A motor is connected to the second nozzle assembly to align a selected outlet nozzle with the inlet nozzle. A pneumatic cylinder is coupled to the first nozzle assembly to connect the selected outlet nozzle with the inlet nozzle. In this manner, it is possible to measure the contamination level of process fluids supplied at a plurality of measurement points by using a single measuring apparatus.

Claims

1. A fluid sampling apparatus comprising:

a first nozzle assembly including a plurality of outlet nozzles, each having a first end that is fixed to one of a plurality of fluid lines, the outlet nozzles each supplying a flow of fluid from the corresponding fluid lines, wherein the first nozzle assembly further includes a first plate having a disc shape, the first plate including a plurality of first fluid passages passing through the first plate and formed along a periphery of the first plate, and wherein the outlet nozzles are connected to first sides of the first fluid passages;

a second nozzle assembly installed in opposition to the first nozzle assembly and including an inlet nozzle that receives the flow of fluid from a selected one of the plurality of outlet nozzles, wherein the second nozzle assembly further includes a second plate having a disc shape, and wherein the inlet nozzle is connected to a first side of the second plate;

a driving system that selects one of the outlet nozzles from the plurality of outlet nozzles, wherein in a first position, the driving system connects a second end of the selected one of the outlet nozzles with the inlet nozzle, and wherein in a second position, the driving system separates the second end of the selected one of the outlet nozzles from the inlet nozzle, wherein the driving system includes a rotating shaft connected to a central portion of the second plate, a motor connected to the rotating shaft for aligning the selected outlet nozzle with the inlet nozzle, and a pneumatic cylinder connected to the first plate for connecting and separating the selected outlet nozzle to and from the inlet nozzle, and

a second fluid passage connected to the inlet nozzle passing through a central portion of the second plate to a center axis of the rotating shaft, wherein the second nozzle assembly further includes a plurality of auxiliary inlet nozzles connected to the first side of the second plate corresponding to the plurality of outlet nozzles other than the selected outlet nozzle, and a plurality of third fluid passages formed through the second plate along a periphery of the second plate, wherein the auxiliary inlet nozzles are connected to the third fluid passages, respectively.

2. The fluid sampling apparatus as claimed in claim 1, wherein the third fluid passages are each formed having a smaller cross-sectional area than a cross-sectional area of the second fluid passage.

3. The fluid sampling apparatus as claimed in claim 1, wherein the outlet nozzles and the inlet nozzle are comprised of polytetrafluoroethylene, and wherein the first and second plates are comprised of polytetrafluoroethylene or stainless steel.

4. The fluid sampling apparatus as claimed in claim 1, wherein first ends of the plurality of outlet nozzles are formed in a convex conical shape, and wherein a first end of the inlet nozzle is formed in a concave conical shape.

5. The fluid sampling apparatus as claimed in claim 1, further comprising a controller, in communication with the driving system so as to align the selected outlet nozzle with the inlet nozzle, the controller further controlling an operation of the driving system so as to reciprocate the second nozzle assembly for connecting and separating the selected nozzle to and from the inlet nozzle.

6. The fluid sampling apparatus as claimed in claim 1 further comprising a fluid supply connected by the fluid lines to the plurality of outlet nozzles, that supplies dionized water to the plurality of outlet nozzles for sampling.

7. The fluid sampling apparatus as claimed in claim 6, further comprising a container having the first and second nozzle assemblies therein and containing deionized water that is continuously supplied from the outlet nozzles, a drain line connected to a side portion of the container for draining the deionized water from the container, a water level detecting sensor installed in the container for detecting a level of deionized water, and a valve installed in the drain line for adjusting a draining rate of the deionized water based on a signal from the water level detecting sensor, wherein the first and second nozzle assemblies are immersed in the deionized water contained by the container.

8. The fluid sampling apparatus as claimed in claim 7, further comprising a plurality of first sampling lines connected to the outlet nozzles, a plurality of second sampling lines connected to the fluid lines, and a plurality of connectors installed at one side of the container for connecting the first sampling lines to the second sampling lines.

9. The fluid sampling apparatus as claimed in claim 1 further comprising a fluid supply connected by the fluid lines to the plurality of outlet nozzles, that supplies a fluid selected from the group consisting of air, nitrogen, oxygen, and argon to the plurality of outlet nozzles for sampling.

10. The fluid sampling apparatus as claimed in claim 9, further comprising an enclosed container containing the first and second nozzle assemblies therein, a drain line connected to the enclosed container for draining the fluid continuously supplied from the outlet nozzles into the enclosed container, a pressure sensor installed in the enclosed container for sensing an internal pressure in the enclosed container, and a valve installed in the drain line for adjusting a draining amount of the fluid based on a signal from the pressure sensor.

11. The fluid sampling apparatus as claimed in claim 9, further comprising an enclosed container having the first and second nozzle assemblies therein, a drain line connected to the enclosed container for draining the fluid continuously supplied from the outlet nozzles into the enclosed container, and a pressure control valve installed in the drain line for adjusting a draining amount of the fluid based on a change of an internal pressure in the enclosed container.

12. The fluid sampling apparatus as claimed in claim 1, wherein, when the driving system is in the second position, a distance between the outlet nozzle and the inlet nozzle is about 5 to 10 mm.

13. A fluid analyzer comprising:

a fluid sampling unit including a first nozzle assembly having a plurality of outlet nozzles connected to fluid lines for supplying a flow of fluid from the fluid lines, a second nozzle assembly installed in opposition to the first nozzle assembly and having an inlet nozzle that receives the fluid from a selected one of the outlet nozzles, and a driving system that selects the selected one of the outlet nozzles and that connects and separates the selected outlet nozzle to and from the inlet nozzle;

a measuring device connected to the inlet nozzle that measures a contamination level of the fluid supplied through the selected outlet nozzle and the inlet nozzle, wherein the measuring device includes a particle counter for measuring a number of particles contained in the fluid; and

a data management unit connected to the measuring device to store and manage data measured by the measuring device.

14. The fluid analyzer as claimed in claim 13, wherein the measuring device further includes a dissolved oxygen measuring apparatus, a carbon content measuring apparatus, and a resistivity measuring apparatus.

15. The fluid analyzer as claimed in claim 13, further comprising a flow rate adjusting section, installed at a line connecting the inlet nozzle to the measuring device so as to adjust a flow rate of the fluid supplied into the measuring device.

16. The fluid analyzer as claimed in claim 13, further comprising a display unit connected to the data management unit for displaying the data stored and measured by the measuring device in real time and for displaying the data stored in the data management unit.

17. A fluid sampling apparatus comprising:

a first nozzle assembly including a plurality of outlet nozzles, each having a first end that is fixed to one of a plurality of fluid lines, the outlet nozzles each supplying a flow of fluid from the corresponding fluid lines;

a second nozzle assembly installed in opposition to the first nozzle assembly and including an inlet nozzle that receives the flow of fluid from a selected one of the plurality of outlet nozzles; and

a driving system that selects one of the outlet nozzles from the plurality of outlet nozzles, wherein in a first position, the driving system connects a second end of the selected one of the outlet nozzles with the inlet nozzle, and wherein in a second position, the driving system separates the second end of the selected one of the outlet nozzles from the inlet nozzle, the fluid sampling apparatus further comprising a fluid supply connected by the fluid lines to the plurality of outlet nozzles, that supplies deionized water to the plurality of outlet nozzles, a container having the first and second nozzle assemblies therein and containing the deionized water that is continuously supplied from the outlet nozzles, a drain line connected to a side portion of the container for draining the deionized water from the container, a water level detecting sensor installed in the container for detecting a level of deionized water, and a valve installed in the drain line for adjusting a draining rate of the deionized water based on a signal from the water level detecting sensor, wherein the first and second nozzle assemblies are immersed in the deionized water contained by the container.

18. A fluid sampling apparatus comprising:

a first nozzle assembly including a plurality of outlet nozzles, each having a first end that is fixed to one of a plurality of fluid lines, the outlet nozzles each supplying a flow of fluid from the corresponding fluid lines;

a second nozzle assembly installed in opposition to the first nozzle assembly and including an inlet nozzle that receives the flow of fluid from a selected one of the plurality of outlet nozzles; and

a driving system that selects one of the outlet nozzles from the plurality of outlet nozzles, wherein in a first position, the driving system connects a second end of the selected one of the outlet nozzles with the inlet nozzle, and wherein in a second position, the driving system separates the second end of the selected one of the outlet nozzles from the inlet nozzle, the fluid sampling apparatus further comprising a fluid supply connected by the fluid lines to the plurality of outlet nozzles, that supplies a fluid selected from the group consisting of air, nitrogen, oxygen, and argon to the plurality of outlet nozzles, the fluid sampling apparatus further comprising an enclosed container containing the first and second nozzle assemblies therein, a drain line connected to the enclosed container for draining the fluid continuously supplied from the outlet nozzles into the enclosed container, a pressure sensor installed in the enclosed container for sensing an internal pressure in the enclosed container, and a valve installed in the drain line for adjusting a draining amount of the fluid based on a signal from the pressure sensor.

19. A fluid sampling apparatus comprising:

a first nozzle assembly including a plurality of outlet nozzles, each having a first end that is fixed to one of a plurality of fluid lines, the outlet nozzles each supplying a flow of fluid from the corresponding fluid lines;

a second nozzle assembly installed in opposition to the first nozzle assembly and including an inlet nozzle that receives the flow of fluid from a selected one of the plurality of outlet nozzles; and

a driving system that selects one of the outlet nozzles from the plurality of outlet nozzles, wherein in a first position, the driving system connects a second end of the selected one of the outlet nozzles with the inlet nozzle, and wherein in a second position, the driving system separates the second end of the selected one of the outlet nozzles from the inlet nozzle, the fluid sampling apparatus further comprising a fluid supply connected by the fluid lines to the plurality of outlet nozzles, that supplies a fluid selected from the group consisting of air, nitrogen, oxygen, and argon to the plurality of outlet nozzles, the fluid sampling apparatus further comprising an enclosed container having the first and second nozzle assemblies therein, a drain line connected to the enclosed container for draining the fluid continuously supplied from the outlet nozzles into the enclosed container, and a pressure control valve installed in the drain line for adjusting a draining amount of the fluid based on a change of an internal pressure in the enclosed container.

20. A fluid sampling apparatus comprising:

a first nozzle assembly including a plurality of outlet nozzles connected to fluid lines for supplying a fluid from the fluid lines, wherein the first nozzle assembly further includes a first plate having a disc shape, the first plate including a plurality of first fluid passages passing through the first plate and formed along a periphery of the first plate, and wherein the outlet nozzles are connected to first sides of the first fluid passages;

a second nozzle assembly installed in opposition to the first nozzle assembly and including an inlet nozzle for receiving the fluid from a selected one of the plurality of outlet nozzles, wherein the second nozzle assembly further includes a second plate having a disc shape, and wherein the inlet nozzle is connected to a first side of the second plate;

a driving system for selecting one of the outlet nozzles from the plurality of outlet nozzles and for connecting the selected one of the outlet nozzles with the inlet nozzle and for separating the selected one of the outlet nozzles from the inlet nozzle, wherein the driving system includes a rotating shaft connected to a central portion of the second plate, a motor connected to the rotating shaft for aligning the selected outlet nozzle with the inlet nozzle, and a pneumatic cylinder connected to the first plate for connecting and separating the selected outlet nozzle to and from the inlet nozzle; and

a second fluid passage connected to the inlet nozzle passing through a central portion of the second plate to a center axis of the rotating shaft, wherein the second nozzle assembly further includes a plurality of auxiliary inlet nozzles connected to the first side of the second plate corresponding to the plurality of outlet nozzles other than the selected outlet nozzle, and a plurality of third fluid passages formed through the second plate along a periphery of the second plate, wherein the auxiliary inlet nozzles are connected to the third fluid passages, respectively.

21. A fluid sampling apparatus comprising:

a first nozzle assembly including a plurality of outlet nozzles connected to fluid lines for supplying a fluid from the fluid lines;

a second nozzle assembly installed in opposition to the first nozzle assembly and including an inlet nozzle for receiving the fluid from a selected one of the plurality of outlet nozzles; and

a driving system for selecting one of the outlet nozzles from the plurality of outlet nozzles and for connecting the selected one of the outlet nozzles with the inlet nozzle and for separating the selected one of the outlet nozzles from the inlet nozzle, the fluid sampling apparatus further comprising a fluid supply connected by the fluid lines to the plurality of outlet nozzles, that supplies dionized water to the plurality of outlet nozzles, a container having the first and second nozzle assemblies therein and containing the deionized water that is continuously supplied from the outlet nozzles, a drain line connected to a side portion of the container for draining the deionized water from the container, a water level detecting sensor installed in the container for detecting a level of deionized water, and a valve installed in the drain line for adjusting a draining rate of the deionized water based on a signal from the water level detecting sensor, wherein the first and second nozzle assemblies are immersed in the deionized water contained by the container.

22. A fluid sampling apparatus comprising:

a first nozzle assembly including a plurality of outlet nozzles connected to fluid lines for supplying a fluid from the fluid lines;

a second nozzle assembly installed in opposition to the first nozzle assembly and including an inlet nozzle for receiving the fluid from a selected one of the plurality of outlet nozzles; and

a driving system for selecting one of the outlet nozzles from the plurality of outlet nozzles and for connecting the selected one of the outlet nozzles with the inlet nozzle and for separating the selected one of the outlet nozzles from the inlet nozzle, the fluid sampling apparatus further comprising a fluid supply connected by the fluid lines to the plurality of outlet nozzles, that supplies a fluid selected from the group consisting of air, nitrogen, oxygen, and argon to the plurality of outlet nozzles, the fluid sampling apparatus further comprising an enclosed container containing the first and second nozzle assemblies therein, a drain line connected to the enclosed container for draining the fluid continuously supplied from the outlet nozzles into the enclosed container, a pressure sensor installed in the enclosed container for sensing an internal pressure in the enclosed container, and a valve installed in the drain line for adjusting a draining amount of the fluid based on a signal from the pressure sensor.

23. A fluid sampling apparatus comprising:

a first nozzle assembly including a plurality of outlet nozzles connected to fluid lines for supplying a fluid from the fluid lines;

a second nozzle assembly installed in opposition to the first nozzle assembly and including an inlet nozzle for receiving the fluid from a selected one of the plurality of outlet nozzles; and

a driving system for selecting one of the outlet nozzles from the plurality of outlet nozzles and for connecting the selected one of the outlet nozzles with the inlet nozzle and for separating the selected one of the outlet nozzles from the inlet nozzle, the fluid sampling apparatus further comprising a fluid supply connected by the fluid lines to the plurality of outlet nozzles, that supplies a fluid selected from the group consisting of air, nitrogen, oxygen, and argon to the plurality of outlet nozzles, the fluid sampling apparatus further comprising an enclosed container having the first and second nozzle assemblies therein, a drain line connected to the enclosed container for draining the fluid continuously supplied from the outlet nozzles into the enclosed container, and a pressure control valve installed in the drain line for adjusting a draining amount of the fluid based on a change of an internal pressure in the enclosed container.

24. A fluid analyzer comprising:

a fluid sampling unit including a first nozzle assembly having a plurality of outlet nozzles connected to fluid lines for supplying a fluid from the fluid lines, a second nozzle assembly installed in opposition to the first nozzle assembly and having an inlet nozzle for receiving the fluid from a selected one of the outlet nozzles, and a driving system for selecting the selected one of the outlet nozzles and for connecting and separating the selected outlet nozzle to and from the inlet nozzle;

a measuring device connected to the inlet nozzle for measuring a contamination level of the fluid supplied through the selected outlet nozzle and the inlet nozzle, wherein the measuring device includes a particle counter for measuring a number of particles contained in the fluid; and

a data management unit connected to the measuring device to store and manage data measured by the measuring device.