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Device for holding a substrate

  • US 7,105,134 B2
  • Filed: 03/11/2002
  • Issued: 09/12/2006
  • Est. Priority Date: 03/13/2001
  • Status: Expired due to Fees
First Claim
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1. A device for holding a substrate, characterized by upper and lower plates adapted to receive the substrate sandwiched in the interface between the plates, each plate having at least one opening with a projecting rim surrounding the opening and directed away from the interface, wherein the openings in the upper and lower plates are at least partially aligned in the sandwiched position of the plates, wherein each opening in the lower plate is provided with a shielding member partially shielding the opening of the lower plate, wherein the opening(s) in the lower plate is (are) staggered with respect to the opening(s) in the upper plate, and wherein the shielding member(s) in the lower plate opening(s) fully shield the lower plate opening(s) with respect to the upper plate opening(s).

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