Method for eliminating low frequency error sources to critical dimension uniformity in shaped beam writing systems
First Claim
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1. A method for generating flashes on a substrate, comprising:
- receiving one or more figures of a pattern to be printed on the substrate;
decomposing each figure into at least four substantially rectangular shapes, wherein the four substantially rectangular shapes are separated by at least one horizontal boundary and at least one vertical boundary; and
generating a flash for each substantially rectangular shape, wherein the flashes are generated to form each figure such that the edges of each figure are an image of a first aperture.
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Abstract
A method and system for generating flashes on a substrate. The method includes receiving one or more figures of a pattern to be printed on the substrate and decomposing each figure into at least four substantially rectangular shapes. The four substantially rectangular shapes are separated by at least one horizontal boundary and at least one vertical boundary. The method further includes generating a flash for each substantially rectangular shape such that each edge of each figure is an image of the same aperture.
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Citations
22 Claims
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1. A method for generating flashes on a substrate, comprising:
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receiving one or more figures of a pattern to be printed on the substrate; decomposing each figure into at least four substantially rectangular shapes, wherein the four substantially rectangular shapes are separated by at least one horizontal boundary and at least one vertical boundary; and generating a flash for each substantially rectangular shape, wherein the flashes are generated to form each figure such that the edges of each figure are an image of a first aperture. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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17. An apparatus for writing flashes on a substrate, comprising:
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a data processing system configured to receive one or more figures of a pattern and decompose each figure into at least four substantially rectangular shapes, wherein the substantially rectangular shapes are separated by at least one horizontal boundary and at least one vertical boundary; a flash generator coupled to the data processing system, wherein the flash generator is configured to generate signals that control an operation of one or more deflectors of an energy beam column; and an energy beam column having a first aperture and a second aperture, wherein the energy beam column is coupled to the flash generator and wherein the energy beam column is configured to generate a flash for each substantially rectangular shape in response to the generated signals, wherein the flashes are generated to form each figure such that the edges of each figure are an image of the first aperture. - View Dependent Claims (18, 19, 20, 21, 22)
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Specification