Elementary analysis device by optical emission spectrometry on laser produced plasma

• US 7,106,439 B2
• Filed: 09/01/2004
• Issued: 09/12/2006
• Est. Priority Date: 11/03/1999
• Status: Expired due to Term

• Current Assignee: Commissariat a L'Energie Atomique (AES Corporation)
• Original Assignee: Commissariat A L'Energie Atomique et AUX Energies Alternatives
• Inventors: Lacour, Jean-Luc, Mauchien, Patrick, Wagner, Jean-François, Detalle, Vincent
• Primary Examiner(s): Lavarias, Arnel C.
• Application Number:
  US10/932,829
• Publication Number:
  US 20050024638A1
• Time in Patent Office: 741 Days
• Field of Search: 356/318, 356/311, 356/317, 356/326, 356/330, 356/300, 359/739, 250/372
• US Class Current: 356/318
• CPC Class Codes: G01N 21/718 Laser microanalysis, i.e. with formation of sample plasma

Abstract

This device comprises a pulsed laser source (6), means (8, 10, 12) for focusing light from this source onto an object to be analysed (2) to produce plasma on the surface of the object, means (16, 18) of analyzing a plasma radiation spectrum, means (20) of determining the elementary composition of the object from this analysis, and possibly means (4) for displacing the object. The invention is particularly applicable to test radioactive materials.

Claims

1. Elementary analysis device by optical emission spectrometry on laser produced plasma, the device comprising:

a pulsed laser source;

a diaphragm having an aperture of a fixed diameter for selecting part of a laser beam emitted by said pulsed laser source on an object to be analysed, said laser beam not being focused in the plane of said diaphragm,

first optical means projecting the image of the diaphragm to infinity,

second optical means receiving the image of said diaphragm projected to infinity by said first optical means and focusing it on said object to be analysed to produce plasma on the surface of, said object,

wherein the image of said diaphragm focused on said object is equal to a required dimension on said object, said required dimension corresponding to a required spatial resolution; and

the focal point of said laser beam, after crossing through said diaphragm and said first and second optical means, is outside the image plane of the diaphragm;

means for analyzing a light radiation spectrum emitted by the plasma, said means for analyzing disposed adjacent to the plasma;

means for determining the elementary composition of said object from the means for analyzing a light radiation spectrum; and

means for displacing said object within a plane after each pulse of said laser source.

2. Device according to claim 1, wherein said second optical means have a numerical aperture equal to approximately 0.1 or greater.

3. Device according to claim 1, wherein an impact size of the laser beam on the object is greater than or equal to 1 μ

m.

4. Device according to claim 1, further comprising means for displacing the object between two laser pulses at a displacement frequency of the object between two laser pulses of the source is greater than or equal to 15 Hz.

5. Device according to claim 1, wherein the pulsed laser source emits ultraviolet light.

6. Device according to claim 1, wherein a relative variation of energy between one laser pulse and the next does not exceed 5%.

7. Device according to claim 1, wherein said diaphragm comprises a circular aperture for selecting the central part of the laser beam output from the laser source, said first optical means comprise refractive optical means, and said second optical means comprise refractive optical means having a microscope objective.

8. Device according to claim 7, wherein said first and second optical means are antireflection treated at the wavelength of the light emitted by said pulsed laser source.

9. Device according to claim 1, further comprising means for blowing a gas jet onto the object.

10. Device according to claim 1, further comprising:

means for observing said object, so that said object can be placed in the image plane of said diaphragm, and

a mirror reflecting at the wavelength of said pulsed laser source and transparent at other wavelengths, said mirror being placed on the light path between said first and second optical means and designed to reflect almost the entire laser beam to said second optical means and to transmit an image of said object to said means for observation.

11. Device according to claim 2, wherein the impact size of the laser beam on said object is greater than or equal to 1 μ

m.

12. Device according to claim 3, wherein said object has a displacement frequency between two laser pulses of said laser source, said displacement frequency being greater than or equal to about 15 Hz.

13. Device according to claim 6, wherein said diaphragm (8) comprises a circular aperture for selecting the central part of the laser beam output from the laser source, said first optical means are refractive optical means, and said second optical means are refractive optical means comprising a microscope objective (12).

14. Device according to claim 8, further comprising means (38) for blowing a gas jet onto said object (2).

15. Device according to claim 1, wherein said diaphragm is also usable for delimiting the shape of the impact of the laser beam on an object to be analyzed.