Bias voltage routing scheme for a digital micro-mirror device
First Claim
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1. An apparatus for use with a digital micro-mirror, comprising:
- a hinge disposed outwardly from a substrate and capable of at least partially supporting a micro-mirror disposed outwardly from the hinge, the micro-mirror capable of being selectively transitioned between an on-state position and an off-state position based at least in part on a bias voltage received by a conductive layer;
a hinge void disposed inwardly from the hinge; and
a plurality of interconnected conductive conduits formed within the conductive layer and disposed inwardly from the micro-mirror, wherein the plurality of interconnected conductive conduits enable a conductive path for the bias voltage substantially inwardly from a periphery of the micro-mirror.
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Abstract
An apparatus for use with a digital micro-mirror includes a hinge disposed outwardly from a substrate and capable of at least partially supporting a micro-mirror disposed outwardly from the hinge. The micro-mirror capable of being selectively transitioned between an on-state position and an off-state position based at least in part on a bias voltage received by a conductive conduit. The apparatus also includes a conductive layer disposed inwardly from the at least one micro-mirror. In one particular embodiment, the conductive layer enables a conductive path for the bias voltage substantially inwardly from a periphery of the micro-mirror.
14 Citations
20 Claims
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1. An apparatus for use with a digital micro-mirror, comprising:
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a hinge disposed outwardly from a substrate and capable of at least partially supporting a micro-mirror disposed outwardly from the hinge, the micro-mirror capable of being selectively transitioned between an on-state position and an off-state position based at least in part on a bias voltage received by a conductive layer; a hinge void disposed inwardly from the hinge; and a plurality of interconnected conductive conduits formed within the conductive layer and disposed inwardly from the micro-mirror, wherein the plurality of interconnected conductive conduits enable a conductive path for the bias voltage substantially inwardly from a periphery of the micro-mirror. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A method of forming an apparatus for use with a digital micro-mirror, comprising:
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forming a hinge disposed outwardly from a substrate, the hinge capable of at least partially supporting a micro-mirror disposed outwardly from the hinge; and forming a hinge void within a conductive layer, the hinge void disposed inwardly from the hinge, wherein the hinge void is substantially free from conductive materials; and routing a bias voltage substantially inwardly from a periphery of the micro-mirror. - View Dependent Claims (8, 9, 10, 11, 12, 13, 14)
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15. An apparatus for use with a digital micro-mirror, comprising:
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a hinge disposed outwardly from a substrate and capable of at least partially supporting a micro-mirror disposed outwardly from the hinge, the micro-mirror capable of being selectively transitioned between an on-state position and an off-state position based at least in part on a bias voltage received by a conductive conduit; and a conductive layer disposed inwardly from the at least one micro-mirror, wherein the conductive layer enables a conductive path for the bias voltage substantially inwardly from a periphery of the micro-mirror. - View Dependent Claims (16, 17, 18, 19, 20)
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Specification