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Angular rate sensor using micro electromechanical haltere

  • US 7,107,842 B2
  • Filed: 05/03/2004
  • Issued: 09/19/2006
  • Est. Priority Date: 05/10/2003
  • Status: Active Grant
First Claim
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1. An apparatus for sensing angular motion, the apparatus comprising:

  • a body;

    a first rod coupled to the body;

    a second rod coupled to the body, wherein the first and second rods are non-parallel;

    at least one sensor for sensing a bending of the rods in response to a rotational movement of the body; and

    an actuator for causing a movement of a rod, wherein the actuator includes one or more bars coupled to the actuator and to the flat beam to transfer the movement produced by the actuator to the flat beam, wherein the one or more bars comprise a fourbar linkage.

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