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Gas/ion species selective membrane supported by multi-stage nano-hole array metal structure

  • US 7,108,813 B2
  • Filed: 03/25/2005
  • Issued: 09/19/2006
  • Est. Priority Date: 03/30/2004
  • Status: Expired due to Fees
First Claim
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1. A method of fabricating a metallic membrane, the method comprising:

  • a) providing a porous non-metallic template membrane having opposing first and second surfaces;

    b) first depositing a first metal layer on the first surface such that pores on the first surface are not blocked by the first metal layer;

    c) providing a polymer negative to the template membrane and affixed to the first metal layer, wherein said polymer negative fills pores in said template membrane, thereby having a configuration that is a negative of said template membrane;

    d) removing the non-metallic template membrane to expose pore-filling parts of the polymer negative;

    e) second depositing a second metal onto the first metal layer such that the second metal makes contact with the pore-filling parts of the polymer negative, wherein the polymer negative is kept immersed in a liquid at all times between the removing the non-metallic template membrane and the depositing a second metal; and

    f) removing the polymer negative.

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