×

Object inspection and/or modification system and method

  • US 7,109,482 B2
  • Filed: 06/22/2004
  • Issued: 09/19/2006
  • Est. Priority Date: 07/01/1999
  • Status: Expired due to Fees
First Claim
Patent Images

1. In a scanning probe microscope and/or nanomachining system having scanning probe functionality and non-scanning-probe functionality, the system including a probe and/or tool, the probe and/or tool collectively being referred to as the probe, positioned relative to a sample volume and having relative motion between the probe and the sample volume in the X, Y and Z space and controlled and sensed in desired directions with respect to the sample volume and/or any element thereof, the sample volume and/or any element thereof collectively being referred to as the sample volume, and producing data responsive to the sample volume and/or a property of the sample volume, a method for accurately measuring a parameter of the sample volume or performing a task related to the sample volume, the method including the following steps:

  • providing a first scan, by the probe, on the sample volume in X, Y and Z to produce data representative of a true surface of the sample volume, the true surface including at least one portion that is a non-function wherein for at least one pair of x,y coordinate values, there is more then one z coordinate value, andstoring the data representative of the sample volume, and/or data representative of any parametric representation of the sample volume.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×