Object inspection and/or modification system and method

• US 7,109,482 B2
• Filed: 06/22/2004
• Issued: 09/19/2006
• Est. Priority Date: 07/01/1999
• Status: Expired due to Fees

• Current Assignee: Terraspan LLC
• Original Assignee: General Nanotechnology LLC
• Inventors: Kley, Victor B.
• Primary Examiner(s): NGUYEN, KIET TUAN
• Application Number:
  US10/875,151
• Publication Number:
  US 20050056783A1
• Time in Patent Office: 819 Days
• Field of Search: 250/306, 250/307, 250/309, 731/05
• US Class Current: 250/306
• CPC Class Codes: G01Q 20/00 Monitoring the movement or position of the probe
• CPC Class Codes: G01Q 20/02 by optical means
• CPC Class Codes: G01Q 60/04 STM [Scanning Tunnelling Microscopy] combined with AFM [Atomic Force Microscopy]
• CPC Class Codes: G01Q 60/06 SNOM [Scanning Near-field Optical Microscopy] combined with AFM [Atomic Force Microscopy]
• CPC Class Codes: G01Q 70/02 Probe holders
• CPC Class Codes: G01Q 70/06 Probe tip arrays
• CPC Class Codes: G01Q 80/00 Applications, other than SPM, of scanning-probe techniques manufacture or treatment of nanostructures B82B3/00; recording or reproducing information using near-field interaction G11B9/12, G11B11/24, G11B13/08

Abstract

A scanning probe microscope system (100) includes an objective lens (147), a clamping circuit (404), a tip deflection measurement circuit (421), a cantilever (136), and a probe (137) for modifying and inspecting an object (102) disposed on a stage (129).

Claims

1. In a scanning probe microscope and/or nanomachining system having scanning probe functionality and non-scanning-probe functionality, the system including a probe and/or tool, the probe and/or tool collectively being referred to as the probe, positioned relative to a sample volume and having relative motion between the probe and the sample volume in the X, Y and Z space and controlled and sensed in desired directions with respect to the sample volume and/or any element thereof, the sample volume and/or any element thereof collectively being referred to as the sample volume, and producing data responsive to the sample volume and/or a property of the sample volume, a method for accurately measuring a parameter of the sample volume or performing a task related to the sample volume, the method including the following steps:

providing a first scan, by the probe, on the sample volume in X, Y and Z to produce data representative of a true surface of the sample volume, the true surface including at least one portion that is a non-function wherein for at least one pair of x,y coordinate values, there is more then one z coordinate value, and

storing the data representative of the sample volume, and/or data representative of any parametric representation of the sample volume.

2. The method of claim 1 wherein the first scan produces volume data by at least one of an atomic force measurement and a tunneling current measurement.

3. The method of claim 1, and further comprising providing a second scan that is used to modify the sample volume.

4. The method of claim 3 wherein the modification is accomplished by the probe mechanically cutting the sample volume.

5. The method of claim 1, and further comprising:

providing a second operation based on the information previously obtained, and

measuring a portion or all of the volume or any other parameter associated with the volume or making any change to said volume.

6. In a scanning probe microscope and/or nanomachining system having scanning probe functionality and non-scanning-probe functionality, the system including a probe and/or tool, the probe and/or tool collectively being referred to as the probe, positioned relative to a sample volume and/or topography and having relative motion between the probe and the sample volume and/or topography in the X, Y and Z space and controlled and sensed in desired directions with respect to the sample volume and/or topography and/or any element thereof, the sample volume and/or topography and/or any element thereof collectively being referred to as the sample volume and/or topography, and producing data responsive to any element or property of said sample volume and/or topography, a method for accurately measuring a parameter of that sample volume and/or topography or performing a task related to the sample volume and/or topography, the method including the following steps:

performing an initial operation to produce data representative of the bounding volumetric and/or topographic elements of the sample volume and/or topography, wherein the initial operation is performed using the non scanning probe functionality of the system or using external guide data,

storing the data representative of the bounding volume and/or topography, any parametric representation, and/or simultaneous parametric representation and/or any element of that volume or topography,

performing a first scan, by the probe, based on the information previously obtained, and

measuring a portion or all of the volume or topography or any other parameter associated with the volume or topography or making any change to said volume or topography.

7. The method of claim 6 wherein the first scan produces volume or topographic data by at least one of an atomic force measurement and a tunneling current measurement.

8. The method of claim 6, and further comprising providing a second scan that is used to modify the sample volume and/or topography.

9. The method of claim 8 wherein the modification is accomplished by the probe mechanically cutting the sample volume.

10. In a scanning probe microscope and/or nanomachining system having scanning probe functionality and non-scanning-probe functionality, the system including a probe and/or tool, the probe and/or tool collectively being referred to as the probe, positioned relative to a sample volume or topography and having relative motion between the probe and the sample volume and/or topography in the X, Y and Z space and controlled and sensed in desired directions with respect to the sample volume and/or topography and/or any element thereof, the sample volume and/or topography and/or any element thereof collectively being referred to as the sample volume and/or topography, and producing data responsive to any element or property of said sample volume and/or topography, a method for accurately measuring a parameter of the sample volume and/or topography and/or performing a task related to the sample volume and/or topography, the method including the following steps:

providing a first location, by using the probe, on regions around/on or within the sample volume and/or topography in X, Y and Z to locate the volumetric and/or topographic elements of a starting reference point or points relative to the sample volume and/or topography, without storing the data representative of the sample volume or topography, any parametric representation, and/or simultaneous parametric representation and/or any element of that sample volume or topography, and

measuring a portion or all of the sample volume or topography or any other parameter associated with the sample volume or topography and/or making any change to said sample volume or topography.

11. The method of claim 10 wherein said measuring produces volume data by at least one of an atomic force measurement and a tunneling current measurement.

12. The method of claim 10 wherein said measuring produces volume data by a scanning electron beam probe measurement or a scanning ion beam probe measurement.

13. The method of claim 10, and further comprising providing a second scan that is used to modify the volume and/or topography.

14. The method of claim 13 wherein the modification is accomplished by the probe mechanically cutting the volume of the sample.

15. In a scanning probe microscope and/or nanomachining system, the system including one or more SPM probes and/or tools, the one or more SPM probes and/or tools collectively being referred to as the probe, positioned relative to a sample and having relative motion between the probe and the sample in the X, Y and Z space and controlled and sensed in desired directions with respect to the sample and/or any element thereof, the sample and/or any element thereof collectively being referred to as the sample, and producing data responsive to the sample and/or a property of the sample, a method for accurately measuring a parameter of the sample or performing a task related to the sample, the method comprising:

performing an inspection of the sample using the probe to produce SPM inspection data representative of a true surface of the sample, the true surface including at least one portion that is a non-function wherein for at least one pair of x,y coordinate values, there is more then one z coordinate value; and

using the inspection data to perform an additional SPM operation on the sample.

16. The method of claim 15 wherein:

the inspection data is geometric data that characterizes the true surface; and

the additional SPM operation is based directly on the geometric data.

17. The method of claim 15 wherein:

the inspection data is parametric data that characterizes values of a parameter; and

the additional SPM operation is based on the parametric data.

18. The method of claim 15, and further comprising generating guide data based on the inspection data, wherein the additional SPM operation is based on the guide data.

19. The method of claim 18 wherein the inspection data used to generate the guide data only represents a boundary of the sample.

20. The method of claim 19, and further comprising repeating said performing an inspection of the sample, said generating guide data, and said performing an additional SPM operation.

21. The method of claim 18 wherein generating the guide data comprises:

comparing the inspection data with target data; and

if the target data and the inspection data do not match within a predefined tolerance level, generating guide data for guiding the performance of a modification that needs to be made to the sample to fall within the tolerance level.

22. In a scanning probe microscope and/or nanomachining system having scanning probe functional elements and non-scanning-probe functional elements, the system including one or more SPM probes and/or tools, the one or more SPM probes and/or tools collectively being referred to as the probe, positioned relative to a sample and having relative motion between the probe and the sample in the X, Y and Z space and controlled and sensed in desired directions with respect to the sample and/or any element thereof, the sample and/or any element thereof collectively being referred to as the sample, and producing data responsive to the sample and/or a property of the sample, a method for accurately measuring a parameter of the sample or performing a task related to the sample, the method comprising:

performing an inspection of the sample using the probe to produce SPM inspection data representative of the sample;

using the inspection data to locate and identify a reference point on the existing sample;

receiving guide data from one of the non-scanning-probe functional elements, the guide data being independent of the inspection data; and

using the reference point and the guide data to perform an additional SPM operation on the sample.

23. The method of claim 22 wherein the inspection data represents a true surface of the sample, the true surface including at least one portion that is a non-function wherein for at least one pair of x,y coordinate values, there is more then one z coordinate value.

24. The method of claim 22 wherein the reference point is located and identified by comparing the inspection data with target data for the sample.

25. In a scanning probe microscope and/or nanomachining system having scanning probe functionality and non-scanning-probe functionality,

the system including a probe and/or tool, the probe and/or tool collectively being referred to as the probe,

the probe being positioned relative to a sample volume and/or topography and having relative motion between the probe and the sample volume and/or topography in the x, y and z space and controlled and sensed in desired directions with respect to the sample volume and/or topography and/or any element thereof, the sample volume and/or topography and/or any element thereof collectively being referred to as the sample volume and/or topography, and

the probe producing data responsive to the sample volume and/or topography and/or a property of the sample volume and/or topography,

a method for accurately measuring a parameter of the sample volume and/or topography or performing a task related to the sample volume and/or topography, the method including:

performing an initial operation to position the probe relative to the sample volume and/or topography in the x and y coordinates wherein the initial operation is performed using the non-scanning-probe functionality of the system or using external guide data; and

performing at least one scanning probe operation with the probe to determine the z-coordinate of the surface of the sample volume and/or topography and to (a) produce data representing the sample volume and/or topography and/or a property of the sample volume and/or topography, and/or (b) modify the sample volume and/or topography.

26. The method of claim 25 wherein the initial operation is performed using the non-scanning-probe functionality of the system.

27. The method of claim 25 wherein the initial operation is performed using external guide data.

28. The method of claim 25, and further comprising performing at least one additional scanning probe operation with the probe based on the information previously obtained.

29. The method of claim 25 wherein:

the at least one scanning probe operation is a scan, by the probe, on the sample volume in x, y and z to produce data representative of a true surface of the sample volume, the true surface including at least one portion that is a non-function wherein for at least one pair of x,y coordinate values, there is more then one z coordinate value; and

the method further comprises storing the data representative of the sample volume, and/or data representative of any parametric representation of the sample volume.

30. The method of claim 25 wherein:

the method further comprises storing the data representative of the sample volume, and/or data representative of any parametric representation of the sample volume.

31. The method of claim 30 wherein the at least one scanning probe operation produces volume data by at least one of an atomic force measurement and a tunneling current measurement.