×

Method and apparatus for patterning a workpiece and methods of manufacturing the same

  • US 7,110,159 B2
  • Filed: 12/10/2004
  • Issued: 09/19/2006
  • Est. Priority Date: 12/11/2003
  • Status: Active Grant
First Claim
Patent Images

1. A spatial light modulator comprising:

  • a substrate;

    at least one reflective surface, including at least two portions, adapted to induce a phase difference between a radiation reflected by the at least two portions;

    whereinthe phase difference is induced by at least one of a phase plate and a step height difference between the at least two portions.

View all claims
  • 7 Assignments
Timeline View
Assignment View
    ×
    ×