Electrical x-talk shield for MEMS micromirrors

• US 7,110,635 B2
• Filed: 05/21/2004
• Issued: 09/19/2006
• Est. Priority Date: 05/28/2002
• Status: Active Grant

• Current Assignee: Lumentum Operations, LLC (Lumentum Holdings Inc.)
• Original Assignee: Viavi Solutions, Inc. (Lumentum Holdings Inc.)
• Inventors: Miller, John Michael, Keyworth, Barrie, Ma, Yuan, McKinnon, Graham, Mala, Mohiuddin
• Primary Examiner(s): Lee, John D.
• Assistant Examiner(s): ROJAS, OMAR R
• Application Number:
  US10/850,424
• Publication Number:
  US 20050041916A1
• Time in Patent Office: 851 Days
• Field of Search: 359/223, 359/224, 359290-292, 359/295, 359/298, 385 16- 18
• US Class Current: 385/18
• CPC Class Codes: G02B 6/3518 the reflective optical element being an intrinsic part of a MEMS device, i.e. fabricated together with the MEMS device MEMS devices in general B81B; manufacture of MEM devices in general B81C; micromechanical devices controlling the direction of light G02B26/0833
• CPC Class Codes: G02B 6/356 in an optical cross-connect device, e.g. routing and switching aspects of interconnecting different paths propagating different wavelengths to (re)configure the various input and output links switching polarized beams G02B6/3594; power equalizers G02B6/356 and G02B6/3594; path selecting means H04Q11/0001
• CPC Class Codes: G02B 6/357 Electrostatic force electrostatic forces controlling reflecting elements in general G02B26/0841
• CPC Class Codes: G02B 6/3584 constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching MEMS per se B81B, B81C

Abstract

A micro-electro-mechanical (MEMs) mirror device for use in an optical switch is disclosed. A “piano”-style MEMs device includes an elongated platform pivotally mounted proximate the middle thereof by a torsional hinge. The middle portion of the platform and the torsional hinge have a combined width less than the width of the rest of the platform, whereby several of these “piano” MEMs devices can be positioned adjacent each other pivotally mounted about the same axis with only a relatively small air gap therebetween. In a preferred embodiment of the present invention specially designed for wavelength switching applications, a greater range of arcuate motion for a mirror mounted thereon is provided by enabling the platform to rotate about two perpendicular axes. The MEMs mirror device according to the preferred embodiment of the present invention enables the mirror to tilt about two perpendicular axes, by the use of an “internal” gimbal ring construction, which ensures that a plurality of adjacent mirror devices have a high fill factor, without having to rely on complicated and costly manufacturing processes. To limit the amount of electrical crosstalk between adjacent mirrors, shielding can be positioned between the electrodes. The shielding can extend upwardly from the substrate and/or downwardly from the undersurface of the mirrors. When both types of shielding are provided, one set is offset from the other to prevent abutment thereof, and to enable an overlapping effect, which enhances the protection.

Claims

1. A micro-electro-mechanical device mounted on a substrate comprising:

a first pivoting member pivotally mounted above the substrate;

a second pivoting member pivotally mounted above the substrate adjacent the first pivoting member, wherein each of the first and second pivoting members includes first and second supporting regions on opposite sides of a first pivot axis;

a first electrode positioned below the first supporting region of the first pivoting member for actuating the first pivoting member;

a second electrode positioned below the first supporting region of the second pivoting member proximate the first electrode for actuating the second pivoting member;

a first shield positioned between the first and second electrodes extending upwardly from the substrate above an upper surface of the first electrode for shielding the first pivoting member from fringing electric fields from the second electrode;

a third electrode positioned below the second supporting region of the first pivoting member;

a fourth electrode positioned below the second supporting region of the second pivoting member; and

an additional shield extending upwardly from the substrate including shielding on opposite sides of the third and fourth electrode.

2. The device according to claim 1, wherein the first shield also extends downwardly from the first or second pivoting member.

3. The device according to claim 1, wherein each of the first and second pivoting members includes:

a brace means extending between the first and second supporting regions;

a first torsional hinge rotatable about the first pivot axis extending between the brace means and an anchor post extending from the substrate;

wherein a total width of the first torsional hinge and said brace means is less than a width of the first or the second supporting regions;

whereby the first and second pivoting member are pivotable about the first pivot axis and are positionable in close proximity with only an air gap between adjacent first supporting regions and between adjacent second supporting regions.

4. The device according to claim 3, further comprising back reflection cusps extending below the air gaps between adjacent first supporting regions and between adjacent second supporting regions to prevent light from being reflected back through the air gaps.

5. The device according to claim 3, wherein each of the first and second pivoting members further comprise:

a gimbal ring surrounding the first torsional hinge, opposite ends of the first torsional hinge being fixed to opposite sides of the gimbal ring;

a second torsional hinge rotatable about a second pivot axis perpendicular to the first pivot axis, the second torsional hinge comprising first and second arms extending from opposite sides of the gimbal ring to the first and second supporting regions, respectively;

a fifth electrode positioned on the substrate for pivoting of the first pivoting member about the second pivot axis.

6. A micro-electro-mechanical device mounted on a substrate comprising:

a first pivoting member pivotally mounted above the substrate;

a second pivoting member pivotally mounted above the substrate adjacent the first pivoting member with only an air gap therebetween;

a first electrode for actuating the first pivoting member;

a second electrode positioned proximate the first electrode for actuating the second pivoting member; and

a first shield positioned between the first and second electrodes for shielding the first pivoting member from fringing electric fields from the second electrode;

wherein the first shield includes an angled, curved or concave upper surface for redirecting light passing through the gap between the first and second pivoting members to prevent light from being reflected back through the air gap.

7. The device according to claim 6, further comprising a second shield extending downwardly from the first or second pivoting member, laterally offset from the first shield, whereby during movement of the first or second pivoting member the first and second shields overlap.

8. The device according to claim 7, wherein said first shield includes shielding positioned on opposite sides of the first and second electrodes;

and

wherein said second shield includes shielding extending from underneath of the first and second pivoting members on opposite sides of the first and second electrodes, respectively.

9. The device according to claim 6, wherein each of the first and second pivoting members includes first and second supporting regions on opposite sides of a first pivot axis;

wherein the first electrode is positioned below the first supporting region of the first pivoting member, and the second electrode is positioned below the first supporting region of the second pivoting member;

wherein the device further comprises;

a third electrode positioned below the second supporting region of the first pivoting member;

a fourth electrode positioned below the second supporting region of the second pivoting member; and

an additional shield extending upwardly from the substrate including shielding on opposite sides of the third and fourth electrode.

10. The device according to claim 6, wherein each of the first and second pivoting members includes:

a brace means extending between the first and second supporting regions;

a first torsional hinge rotatable about the first pivot axis extending between the brace means and an anchor post extending from the substrate;

whereby the first and second pivoting member are pivotable about the first pivot axis and are positionable in close proximity with only an air gap between adjacent first supporting regions and between adjacent second supporting regions.

11. The device according to claim 10, wherein each of the first and second pivoting members further comprise:

a gimbal ring surrounding the first torsional hinge, opposite ends of the first torsional hinge being fixed to opposite sides of the gimbal ring;

a second torsional hinge rotatable about a second pivot axis perpendicular to the first pivot axis, the second torsional hinge comprising first and second arms extending from opposite sides of the gimbal ring to the first and second supporting regions, respectively; and

a gimbal electrode positioned on the substrate for pivoting of the first pivoting member about the second pivot axis.

12. The device according to claim 11, wherein said brace means includes a pair of braces extending between the first and second supporting regions on either side of the gimbal ring.

13. The device according to claim 9, wherein each of the first and second supporting regions include a reflective surface for redirecting light.

14. A micro-electro-mechanical device mounted on a substrate comprising:

a first pivoting member pivotally mounted above the substrate;

a second pivoting member pivotally mounted above the substrate adjacent the first pivoting member;

a first electrode for actuating the first pivoting member;

a second electrode positioned proximate the first electrode for actuating the second pivoting member; and

a first shield positioned between the first and second electrodes for shielding the first pivoting member from fringing electric fields from the second electrode;

wherein the first pivoting member includes a first supporting region; and

wherein the first electrode includes an upper step positioned underneath an inner end of the first supporting region, and a lower step positioned underneath an outer free end of the first supporting region.

15. The device according to claim 14, wherein each of the first and second pivoting members includes first and second supporting regions on opposite sides of a first pivot axis;

wherein the first electrode is positioned below the first supporting region of the first pivoting member, and the second electrode is positioned below the first supporting region of the second pivoting member;

wherein the second shield extends from underneath the first supporting regions of the first and second pivoting members;

wherein the device further comprises;

a third electrode positioned below the second supporting region of the first pivoting member;

a fourth electrode positioned below the second supporting region of the second pivoting member;

a third shield extending upwardly from the substrate including shielding on opposite sides of the third and fourth electrode; and

a fourth shield extending downwardly from the second supporting regions of the first and second pivoting members on opposite sides of the third and fourth electrodes, respectively.

16. The device according to claim 14, wherein each of the first and second pivoting members includes:

a brace means extending between the first and second supporting regions;

a first torsional hinge rotatable about the first pivot axis extending between the brace means and an anchor post extending from the substrate;

whereby the first and second pivoting member are pivotable about the first pivot axis and are positionable in close proximity with only an air gap between adjacent first supporting regions and between adjacent second supporting regions.

17. The device according to claim 16, wherein each of the first and second pivoting members further comprise:

a gimbal ring surrounding the first torsional hinge, opposite ends of the first torsional hinge being fixed to opposite sides of the gimbal ring;

a second torsional hinge rotatable about a second pivot axis perpendicular to the first pivot axis, the second torsional hinge comprising first and second arms extending from opposite sides of the gimbal ring to the first and second supporting regions, respectively; and

a gimbal electrode positioned on the substrate for pivoting of the first pivoting member about the second pivot axis.

18. The device according to claim 17, wherein said brace means includes a pair of braces extending between the first and second supporting regions on either side of the gimbal ring.

20. The device according to claim 17, wherein the shielding extends upwardly from the substrate and downwardly from each platform, wherein the shielding extending from the substrate is laterally offset from the shielding extending from each platform, whereby during movement of the platforms the shielding extending from the substrate and the shielding from each platform overlap.

19. A micro-electro-mechanical device mounted on a substrate comprising;

a plurality of platforms pivotally mounted above the substrate adjacent each other, and pivotable about the same or parallel axes;

at least one electrode disposed beneath each of the platforms; and

shielding positioned between each adjacent electrode for reducing fringing electric field from interfering with adjacent platforms;

wherein the shielding extends downwardly from each of the platforms.