×

Two-step electrode for MEMs micromirrors

  • US 7,110,637 B2
  • Filed: 09/21/2004
  • Issued: 09/19/2006
  • Est. Priority Date: 05/28/2002
  • Status: Expired due to Term
First Claim
Patent Images

1. A micro-electro-mechanical device mounted on a substrate comprising:

  • a pivoting member having a first inner end and a first outer free end pivotally mounted above the substrate about a first pivoting axis;

    a first electrode disposed below the pivoting member for actuation thereof;

    wherein the first electrode includes a first portion beneath the first inner end of the pivoting member with a first force per unit area of the pivoting member, and a second portion beneath the first outer free end of the pivoting member with a second force per unit area of the pivoting member, which is less than the first force per unit area.

View all claims
  • 7 Assignments
Timeline View
Assignment View
    ×
    ×