Two-step electrode for MEMs micromirrors

• US 7,110,637 B2
• Filed: 09/21/2004
• Issued: 09/19/2006
• Est. Priority Date: 05/28/2002
• Status: Expired due to Term

• Current Assignee: Lumentum Operations, LLC (Lumentum Holdings Inc.)
• Original Assignee: Viavi Solutions, Inc. (Lumentum Holdings Inc.)
• Inventors: Miller, John Michael, Ma, Yuan, Mala, Mohiuddin
• Primary Examiner(s): Lee, John D.
• Assistant Examiner(s): ROJAS, OMAR R
• Application Number:
  US10/944,840
• Publication Number:
  US 20050089267A1
• Time in Patent Office: 728 Days
• Field of Search: None
• US Class Current: 385/18
• CPC Class Codes: B81B 2201/042 Micromirrors, not used as optical switches
• CPC Class Codes: B81B 3/0062 Devices moving in two or more dimensions, i.e. having special features which allow movement in more than one dimension
• CPC Class Codes: G02B 6/3518 the reflective optical element being an intrinsic part of a MEMS device, i.e. fabricated together with the MEMS device MEMS devices in general B81B; manufacture of MEM devices in general B81C; micromechanical devices controlling the direction of light G02B26/0833
• CPC Class Codes: G02B 6/3544 2D constellations, i.e. with switching elements and switched beams located in a plane
• CPC Class Codes: G02B 6/356 in an optical cross-connect device, e.g. routing and switching aspects of interconnecting different paths propagating different wavelengths to (re)configure the various input and output links switching polarized beams G02B6/3594; power equalizers G02B6/356 and G02B6/3594; path selecting means H04Q11/0001
• CPC Class Codes: G02B 6/357 Electrostatic force electrostatic forces controlling reflecting elements in general G02B26/0841
• CPC Class Codes: G02B 6/3584 constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching MEMS per se B81B, B81C

Abstract

A “piano”-style MEMs device includes an elongated platform pivotally mounted proximate the middle thereof by a torsional hinge. The middle portion of the platform and the torsional hinge have a combined width less than the width of the rest of the platform, whereby several of these “piano” MEMs devices can be positioned adjacent each other pivotally mounted about the same axis with only a relatively small air gap therebetween. In a preferred embodiment the range of angular motion of a MEMs device'"'"'s platform is increased by reducing the field strength, i.e. the force per unit area, that is sensed at the outer free ends of the platform. Ideally two-step electrodes are provided with a lower step positioned beneath the outer free end of the platform.

Claims

1. A micro-electro-mechanical device mounted on a substrate comprising:

a pivoting member having a first inner end and a first outer free end pivotally mounted above the substrate about a first pivoting axis;

a first electrode disposed below the pivoting member for actuation thereof;

wherein the first electrode includes a first portion beneath the first inner end of the pivoting member with a first force per unit area of the pivoting member, and a second portion beneath the first outer free end of the pivoting member with a second force per unit area of the pivoting member, which is less than the first force per unit area.

2. The device according to claim 1, wherein first portion comprises a first step, and the second portion comprises a second step lower than the first step.

3. The device according to claim 2, wherein the second step includes an element with a width less than that of the first step.

4. The device according to claim 2, wherein the surface area of the second step is less than that of the first step.

5. The device according to claim 1, wherein the second portion includes an element with a width less than that of the first portion.

6. The device according to claim 1, wherein the surface area of the second portion is less than that of the first portion.

7. The device according to claim 1, wherein the pivoting member includes first and second supporting regions on opposite sides of the first pivoting axis, each supporting region having an inner end and an outer free end;

wherein the first electrode is disposed under the first supporting region;

wherein a second electrode is disposed under the second supporting region; and

wherein the second electrode includes a first portion beneath the inner end of the second supporting region with a third force per unit area of the pivoting member, and a second portion beneath the outer free end of the second supporting region with a fourth force per unit area of the pivoting member, which is less than the third force per unit area.

8. The device according to claim 7, wherein the pivoting member includes:

a brace means extending between the first and second supporting regions; and

a first torsional hinge rotatable about the first pivoting axis extending between the brace means and an anchor post extending from the substrate.

9. The device according to claim 8, wherein the pivoting member further comprises:

a gimbal ring surrounding the first torsional hinge, opposite ends of the first torsional hinge being fixed to opposite sides of the gimbal ring; and

a second torsional hinge rotatable about a second pivot axis perpendicular to the first pivot axis, the second torsional hinge comprising first and second arms extending from opposite sides of the gimbal ring to the first and second supporting regions, respectively.

10. The device according to claim 9, further comprising:

a third electrode positioned below the first supporting region adjacent the first electrode; and

a fourth electrode positioned below the second supporting region adjacent the second electrode;

wherein the third and fourth electrodes are for rotating the pivoting member about the second pivoting axis.

11. The device according to claim 10, wherein the third electrode includes a first portion beneath the inner end of the first supporting region with a fifth force per unit area of the pivoting member, and a second portion beneath the outer free end of the first supporting region with a sixth force per unit area of the pivoting member, which is less than the fifth force per unit area;

and

wherein the fourth electrode includes a first portion beneath the inner end of the second supporting region with a seventh force per unit area of the pivoting member, and a second portion beneath the outer free end of the second supporting region with a eighth force per unit area of the pivoting member, which is less than the seventh force per unit area.

12. The device according to claim 9, wherein said brace means includes a pair of braces extending between the first and second supporting regions on either side of the gimbal ring.

13. The device according to claim 7, wherein each of the first and second supporting regions include a reflective surface for redirecting light.

14. A micro-electro-mechanical device mounted on a substrate comprising;

a plurality of platforms pivotally mounted above the substrate adjacent each other, and pivotable about the same or parallel axes, each platform having an inner end and an outer free end; and

at least one electrode disposed beneath each of the platforms,

wherein each electrode includes a first portion beneath the inner end of one of the platforms with a first force per unit area of the platform, and a second portion beneath the outer free end of one of the platforms with a second force per unit area of the platform, which is less than the first force per unit area.

15. The device according to claim 14, wherein first portion comprises a first step, and the second portion comprises a second step lower than the first step.

16. The device according to claim 15, wherein the second step includes an element with a width less than that of the first step.

17. The device according to claim 15, wherein the surface area of the second step is less than that of the first step.

18. The device according to claim 14, wherein the second portion includes an element with a width less than that of the first portion.

19. The device according to claim 14, wherein the surface area of the second portion is less than that of the first portion.

20. The device according to claim 14, further comprising shields on either side of each electrode beneath each platform for reducing cross-talk therebetween.