In-situ oxide capping after CVD low k deposition
First Claim
Patent Images
1. A method of processing a substrate, comprising:
- flowing one or more organosilicon compounds and one or more oxidizing gases into a chamber;
depositing a low dielectric constant film comprising silicon, carbon, and oxygen on a substrate in the chamber in the presence of RF power;
increasing a total flow rate of the one of more oxidizing gases into the chamber after depositing the low dielectric constant film;
decreasing a total flow rate of the one or more organosilicon compounds into the chamber after depositing the low dielectric constant film; and
thendepositing an oxide rich cap on the low dielectric constant film in the chamber in the presence of RF power, while maintaining the total flow rate of the one or more oxidizing gases and the total flow rate of the one or more organosilicon compounds.
1 Assignment
0 Petitions
Accused Products
Abstract
A method of processing a substrate including depositing a low dielectric constant film comprising silicon, carbon, and oxygen on the substrate and depositing an oxide rich cap on the low dielectric constant film is provided. The low dielectric constant film is deposited from a gas mixture comprising an organosilicon compound and an oxidizing gas in the presence of RF power in a chamber. The RF power and a flow of the organosilicon compound and the oxidizing gas are continued in the chamber after the deposition of the low dielectric constant film at flow rates sufficient to deposit an oxide rich cap on the low dielectric constant film.
158 Citations
20 Claims
-
1. A method of processing a substrate, comprising:
-
flowing one or more organosilicon compounds and one or more oxidizing gases into a chamber; depositing a low dielectric constant film comprising silicon, carbon, and oxygen on a substrate in the chamber in the presence of RF power; increasing a total flow rate of the one of more oxidizing gases into the chamber after depositing the low dielectric constant film; decreasing a total flow rate of the one or more organosilicon compounds into the chamber after depositing the low dielectric constant film; and
thendepositing an oxide rich cap on the low dielectric constant film in the chamber in the presence of RF power, while maintaining the total flow rate of the one or more oxidizing gases and the total flow rate of the one or more organosilicon compounds. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
-
-
9. A method of processing a substrate, comprising:
- flowing an organosilicon compound, an oxidizing gas, and a carrier gas into a chamber;
depositing a low dielectric constant film comprising silicon, carbon, and oxygen on a substrate in the chamber in the presence of RF power at a first power level; increasing a flow rate of the oxidizing gas into the chamber after depositing the low dielectric constant film and while maintaining the RF power in the chamber at the first power level; decreasing a flow rate of the organosilicon compound into the chamber after depositing the low dielectric constant film and while maintaining the RF power in the chamber at the first power level; and
thendepositing an oxide rich cap on the low dielectric constant film in the chamber in the presence of the RF power at the first power level immediately after the deposition of the low dielectric constant film. - View Dependent Claims (10, 11, 12, 13, 14)
- flowing an organosilicon compound, an oxidizing gas, and a carrier gas into a chamber;
-
15. A method of processing a substrate, comprising:
-
flowing an organosilicon compound, an oxidizing gas, and a carrier gas into a chamber; depositing a low dielectric constant film comprising silicon, carbon, and oxygen on a substrate in the chamber in the presence of RF power; decreasing the percent volume of the oxidizing gas in the chamber after depositing the low dielectric constant film; decreasing the percent volume of the organosilicon compound in the chamber after depositing the low dielectric constant film; increasing the percent volume of the carrier gas in the chamber after depositing the low dielectric constant film; and
thendepositing an oxide rich cap on the low dielectric constant film in the chamber in the presence of the RF power. - View Dependent Claims (16, 17, 18, 19, 20)
-
Specification