High purity fluid delivery system

• US 7,114,517 B2
• Filed: 11/01/2005
• Issued: 10/03/2006
• Est. Priority Date: 11/26/2001
• Status: Expired

• Current Assignee: Emerson Electric Company
• Original Assignee: Emerson Electric Company
• Inventors: Sund, Wesley E., Dille, Joseph C., Pawlas, Gary E., Barger, Michael J.
• Primary Examiner(s): Krishnamurthy, Ramesh
• Application Number:
  US11/265,429
• Publication Number:
  US 20060054219A1
• Time in Patent Office: 336 Days
• Field of Search: 137/12, 137/14, 137/487.5, 222/52, 222/63, 222/71, 222/386.5, 222/389, 451/60, 451/99, 451/446
• US Class Current: 137/487.5
• CPC Class Codes: G01F 1/8413 means for influencing the flowmeter's motional or vibrational behaviour, e.g., conduit support or fixing means, or conduit attachments
• CPC Class Codes: G01F 1/8422 exciters
• CPC Class Codes: G01F 1/8495 with multiple measuring conduits
• CPC Class Codes: G05D 7/0635 by action on throttling means G05D7/0688, G05D7/0694 take precedence
• CPC Class Codes: Y10T 137/3127 With gas maintenance or application
• CPC Class Codes: Y10T 137/7759 Responsive to change in rate of fluid flow
• CPC Class Codes: Y10T 137/7761 Electrically actuated valve

Abstract

A fluid delivery system includes a flow control device and a Coriolis mass flowmeter in fluid communication with the flow control device. The Coriolis flowmeter has a flow-tube made of a high-purity plastic material, such as PFA, making the delivery system suitable for high purity applications. A controller provides a control output signal to the flow control device, which may comprise a pinch valve, so as to vary the flow control device output in response to a setpoint signal and measurement signals received from the flowmeter.

Claims

1. A fluid delivery system, comprising:

a reservoir having an inlet for receiving a gas to pressurize the reservoir and an outlet for dispensing fluid contained in the reservoir;

a first flow control device connected to the reservoir inlet;

a first pressure transmitter connected to the reservoir inlet, the first pressure transmitter providing an output signal;

a second flow control device in fluid communication with the reservoir outlet to control fluid flow out of the reservoir;

a second pressure transmitter connected to the reservoir outlet, the second pressure transmitter providing an output signal;

a Coriolis mass flowmeter in fluid communication with the second flow control device, the Coriolis flowmeter having a flow-tube made of a high-purity plastic material, the Coriolis flowmeter providing an output signal;

a controller receiving a setpoint signal, the controller receiving the output signals from the first and second pressure transmitters and the Coriolis flowmeter and providing control output signals to the first and second flow control devices to vary the pressure of the reservoir and the flow rate of fluid from the reservoir.

2. The fluid delivery system of claim 1, wherein the high-purity plastic material comprises PFA.

3. The fluid delivery system of claim 1, wherein the second flow control device comprises a valve.

4. The fluid delivery system of claim 3, wherein the valve comprises a pinch valve.

5. The fluid delivery system of claim 4, wherein the pinch valve comprises:

an actuator having a ram operatively connected thereto;

a reference surface positioned generally opposite the ram;

a high purity, flexible tube positioned between the ram and the reference surface.

6. The fluid delivery system of claim 5, wherein the actuator comprises a solenoid.

7. The fluid delivery system of claim 5, wherein the actuator comprises a stepper motor.

8. The fluid delivery system of claim 1, wherein the second flow control device comprises a pump having a variable output.

9. The fluid delivery system of claim 8, wherein the pump comprises a peristaltic pump.

10. The fluid delivery system of claim 1, wherein the reservoir includes a bag situated therein for containing a fluid.

11. The fluid delivery system of claim 1, wherein the controller comprises a PID controller.

12. The fluid delivery system of claim 1, wherein the output signal provided by the Coriolis mass flowmeter includes a mass flowrate measurement.

13. The fluid delivery system of claim 1, wherein the output signal provided by the Coriolis mass flowmeter includes a fluid density measurement.

14. The fluid delivery system of claim 1, wherein the output signal provided by the Coriolis mass flowmeter includes a fluid temperature measurement.